Facile Construction of a Laser Scanning Optical Beam Induced Current Microscope

被引：1

作者：

Buragohain, Ankita ^{[1
]}

Kakoty, Nayan M. ^{[1
]}

Zhuo, Guan-Yu ^{[2
]}

Ahmed, Gazi A. ^{[3
]}

Kao, Fu-Jen ^{[4
]}

Mazumder, Nirmal ^{[5
]}

Gogoi, Ankur ^{[6
]}

机构：

[1] Tezpur Univ, Sch Engn, Embedded Syst & Robot Lab, Tezpur 784028, Assam, India

[2] China Med Univ, Inst Translat Med & New Drug Dev, Taichung 40402, Taiwan

[3] Tezpur Univ, Dept Phys, Tezpur 784028, Assam, India

[4] Natl Yang Ming Chiao Tung Univ, Inst Biophoton, Taipei 11221, Taiwan

[5] Manipal Acad Higher Educ, Manipal Sch Life Sci, Dept Biophys, Manipal 576104, Karnataka, India

[6] Jagannath Barooah Coll, Dept Phys, Jorhat 785001, Assam, India

来源：

IEEE PHOTONICS JOURNAL | 2024年 / 16卷 / 01期

关键词：

Microscopy; Optical microscopy; Laser beams; Software; Mirrors; Measurement by laser beam; Optical beams; Current measurement; data acquisition; failure analysis; optical imaging; microscopy; semiconductor device testing; RESOLUTION; ENHANCEMENT; GENERATION; EFFICIENCY; DESIGN;

D O I：

10.1109/JPHOT.2024.3349930

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the design and construction of a laser scanning optical beam-induced current (OBIC) microscope by assembling cost-effective commercial optical and electronic hardware components and developing data acquisition and control software in LabVIEW. A preliminary OBIC image of a Si photodetector acquired by the developed microscope is presented to demonstrate its operational capability. The versatility of the design will allow for the construction of other scanning microscope modalities on the same platform.

引用

页码：1 / 5

页数：5

共 50 条

[31] Multimodal backside imaging of a microcontroller using confocal laser scanning- and optical beam induced current-imaging
Finkeldey, Markus
Goering, Lena
Schellenberg, Falk
Brenner, Carsten
Gerhardt, Nils C.
Hofmann, Martin
PHOTONIC INSTRUMENTATION ENGINEERING IV, 2017, 10110
[32] Super Resolution and Better Contrast in Second Harmonic Scanning Optical Microscope with Low Power Laser Beam
Goswami A.S.
Ahmed G.A.
Choudhury A.
Journal of Optics, 2004, 33 (1) : 29 - 35
[33] Implementation of an inexpensive cathodoluminescence and electron beam induced current image generator coupled to a scanning electron microscope
Benitez-Lara, A.
Cisneros, H.
Bautista, E.
Molina, J.
Morales, F.
Morales-Narvaez, E.
Carrillo-Lopez, J.
Desirena, H.
Lopez, O.
JOURNAL OF INSTRUMENTATION, 2021, 16 (04)
[34] QUANTITATIVE MEASUREMENTS OF BEAM INDUCED CURRENT USING A SCANNING ELECTRON-MICROSCOPE ON SILICON PLANAR DEVICES
BRESSE, JF
JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1976, 1 (04): : 539 - 550
[35] SCANNING LASER MICROSCOPE
DAVIDOVITS, P
EGGER, MD
NATURE, 1969, 223 (5208) : 831 - +
[36] LASER SCANNING MICROSCOPE
不详
ELECTRO-OPTICS, 1983, 15 (07): : 19 - 20
[37] SCANNING LASER MICROSCOPE
BOGDANKEVICH, OV
DJUKOV, VG
BELJAEV, SA
GAVRIKOV, SI
NEVZOROVA, LN
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (02) : 129 - 131
[38] A NEW METHOD FOR DISPLAYING LOW-CONTRAST OPTICAL-BEAM-INDUCED CONTRAST IMAGES IN THE SCANNING OPTICAL MICROSCOPE
WILSON, T
MCCABE, EM
HAMILTON, DK
JOURNAL OF APPLIED PHYSICS, 1986, 59 (03) : 702 - 703
[39] Product development of a MEMS optical scanner for a laser scanning microscope
Miyajima, H
Asaoka, N
Isokawa, T
Ogata, M
Aoki, Y
Imai, M
Fujimori, O
Katashiro, M
Matsumoto, K
FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2002, : 552 - 555
[40] MEMS electromagnetic optical scanner for a commercial laser scanning microscope
Miyajima, F
MOEMS DISPLAY AND IMAGING SYSTEMS, 2003, 4985 : 95 - 105

← 1 2 3 4 5 →