Facile Construction of a Laser Scanning Optical Beam Induced Current Microscope

被引：1

作者：

Buragohain, Ankita ^{[1
]}

Kakoty, Nayan M. ^{[1
]}

Zhuo, Guan-Yu ^{[2
]}

Ahmed, Gazi A. ^{[3
]}

Kao, Fu-Jen ^{[4
]}

Mazumder, Nirmal ^{[5
]}

Gogoi, Ankur ^{[6
]}

机构：

[1] Tezpur Univ, Sch Engn, Embedded Syst & Robot Lab, Tezpur 784028, Assam, India

[2] China Med Univ, Inst Translat Med & New Drug Dev, Taichung 40402, Taiwan

[3] Tezpur Univ, Dept Phys, Tezpur 784028, Assam, India

[4] Natl Yang Ming Chiao Tung Univ, Inst Biophoton, Taipei 11221, Taiwan

[5] Manipal Acad Higher Educ, Manipal Sch Life Sci, Dept Biophys, Manipal 576104, Karnataka, India

[6] Jagannath Barooah Coll, Dept Phys, Jorhat 785001, Assam, India

来源：

IEEE PHOTONICS JOURNAL | 2024年 / 16卷 / 01期

关键词：

Microscopy; Optical microscopy; Laser beams; Software; Mirrors; Measurement by laser beam; Optical beams; Current measurement; data acquisition; failure analysis; optical imaging; microscopy; semiconductor device testing; RESOLUTION; ENHANCEMENT; GENERATION; EFFICIENCY; DESIGN;

D O I：

10.1109/JPHOT.2024.3349930

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the design and construction of a laser scanning optical beam-induced current (OBIC) microscope by assembling cost-effective commercial optical and electronic hardware components and developing data acquisition and control software in LabVIEW. A preliminary OBIC image of a Si photodetector acquired by the developed microscope is presented to demonstrate its operational capability. The versatility of the design will allow for the construction of other scanning microscope modalities on the same platform.

引用

页码：1 / 5

页数：5

共 50 条

[21] Design for optical system of the scanning laser acoustic microscope
Wang, Yafei
Guangxue Jishu/Optical Technique, 1998, (05): : 73 - 75
[22] PROSPECTS OF AN APPLICATION OF A SCANNING TUNNELING MICROSCOPE TO ELECTRON-BEAM-INDUCED CURRENT (EBIC) INVESTIGATIONS
KOSCHINSKI, P
DWORAK, V
KAUFMANN, K
BALK, LJ
DEFECT RECOGNITION AND IMAGE PROCESSING IN SEMICONDUCTORS AND DEVICES, 1994, (135): : 65 - 68
[23] SIMPLE DEVICE FOR MEASURING BEAM CURRENT IN A SCANNING ELECTRON MICROSCOPE
HILL, BH
REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (09): : 1369 - &
[24] Design and construction of a confocal laser scanning microscope for biomolecular imaging
Arunkarthick, S.
Bijeesh, M. M.
Vetcha, Anand Satya
Rastogi, Nishith
Nandakumar, P.
Varier, Geetha K.
CURRENT SCIENCE, 2014, 107 (12): : 1965 - 1969
[25] Confocal scanning beam laser microscope/macroscope: Applications in fluorescence
Dixon, AE
Damaskinos, S
Ribes, A
FLUORESCENCE DETECTION IV, PROCEEDINGS OF, 1996, 2705 : 44 - 52
[26] Electrical characterization of nanocrystalline Si films by scanning tunnelling spectroscopy and beam-induced current in the scanning tunnelling microscope
Nogales, E
Méndez, B
Piqueras, J
Plugaru, R
NANOTECHNOLOGY, 2003, 14 (01) : 65 - 68
[27] Optical system for a multiple-beam scanning electron microscope
Enyama, Momoyo
Sakakibara, Makoto
Tanimoto, Sayaka
Ohta, Hiroya
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2014, 32 (05):
[28] Optical sectioning microscope with a binary hologram based beam scanning
Das, Abhijit
Boruah, B. R.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2011, 82 (04):
[29] Vibration of scanning near-field optical microscope probe with laser-induced thermal effect using Timoshenko beam theory
Lee, H. -L.
Chang, W. -J.
Yang, Y. -C.
Chu, S. -S.
APPLIED PHYSICS B-LASERS AND OPTICS, 2009, 97 (03): : 653 - 659
[30] Vibration of scanning near-field optical microscope probe with laser-induced thermal effect using Timoshenko beam theory
H.-L. Lee
W.-J. Chang
Y.-C. Yang
S.-S. Chu
Applied Physics B, 2009, 97 : 653 - 659

← 1 2 3 4 5 →