3D Heterogeneous Integration (3DHI): An Enabler For Next Generation RF Systems

被引:0
|
作者
Kazior, Thomas [1 ]
Woodruff, Sharon [2 ]
Jones, Gregory [3 ]
Abdomerovic, Iskren [2 ]
机构
[1] DARPA Microsyst Technol Off, Arlington, VA 22203 USA
[2] Booz Allen Hamilton, Evanston, IL USA
[3] Adv Res Consultants, Palm Beach Gardens, FL USA
关键词
3D Heterogeneous Integration (3DHI); millimeter wave; arrays; MMICs; RFICs; InP; GaN; heterojunction; thermal;
D O I
10.1109/BCICTS54660.2023.10310934
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To perform increasingly diverse missions in increasingly crowded electromagnetic (EM) environments, future sensor and communication systems will require increased bandwidth, sensitivity and enhanced functionality per unit area. These needs are driving sensor arrays towards higher levels of integration of a diverse set of materials, devices and components across multiple domains. This includes 3D solutions, particularly at millimeter wave and THz frequencies. This talk will present an overview of the evolution of heterogenous integration programs at DARPA and potential paths forward, including innovations in millimeter wave components and architectures being developed in the ELectronics for G-band ARrays (ELGAR) program, thermal management of high-power density and 3D electronics (THREADS and MiniTherms3D) and 3DHI at the transistor level being explored under the Heterogeneous Heterostructures (H2) and related programs.
引用
收藏
页码:1 / 4
页数:4
相关论文
共 50 条
  • [41] 3D Integration Processes for Advanced Sensor Systems and High-Perfomance RF Components
    Weber, J.
    Fernandez-Bolanos, M.
    Ionescu, A. M.
    Ramm, P.
    MATERIALS, FORMULATION, AND PROCESSES FOR SEMICONDUCTOR, 2.5 AND 3D CHIP PACKAGING, AND HIGH DENSITY INTERCONNECTION PCB, 2018, 86 (08): : 29 - 37
  • [42] Vertical RF Transition With Mechanical Fit for 3-D Heterogeneous Integration
    Chen, Lihan
    Wood, Joseph
    Raman, Sanjay
    Barker, N. Scott
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2012, 60 (03) : 647 - 654
  • [43] 3D integration of heterogeneous MEMS structures by stamping transfer
    Onoe, Hiroaki
    Iwase, Eiji
    Matsumoto, Kiyoshi
    Shimoyama, Isao
    PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, : 366 - 369
  • [44] Heterogeneous Integration of Nano Enabling Devices for 3D ICs
    Wang, Li
    Ma, Rui
    Zhang, Chen
    Dong, Zongyu
    Wang, Xin
    Shi, Zitao
    Liu, Jian
    Lin, Lin
    Zhao, Hui
    Lu, Fei
    Fang, Qiang
    Yang, Chen
    Zhan, Jing
    Ren, Tianling
    Li, Xinxin
    Huang, Ru
    Wang, Albert
    2013 IEEE INTERNATIONAL SYMPOSIUM ON LOW POWER ELECTRONICS AND DESIGN (ISLPED), 2013, : 249 - 254
  • [45] Self-Alignment Structures For Heterogeneous 3D Integration
    Yang, Hyung Suk
    Zhang, Chaoqi
    Bakir, Muhannad S.
    2013 IEEE 63RD ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2013, : 232 - 239
  • [46] Heterogeneous Integration by the 3D Stacking of Thin Silicon Die
    Nittala, Pavani Vamsi Krishna
    Haridas, Karthika
    Sen, Prosenjit
    IEEE 72ND ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC 2022), 2022, : 608 - 613
  • [47] 3D heterogeneous system integration of microsystem and sensor system
    3D-heterogene systemintegration mikro- und sensonsystem
    Biedorf, R., 1600, Eugen G. Leuze Verlag (105): : 1504 - 1513
  • [48] Copper-to-Dielectric Heterogeneous Bonding for 3D Integration
    Lin, Wei
    Li, Juntao
    Washington, Joseph
    Rath, David
    Skordas, Spyridon
    Kirihata, Toshiaki
    Winstel, Kevin
    Peethala, Brown
    Demarest, James
    Song, Da
    Edelstein, Daniel
    Iyer, Subramanian
    2014 4TH IEEE INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D), 2014, : 6 - 6
  • [49] High Density 3D Fanout Package for Heterogeneous Integration
    Jeng, Shin-Puu
    Chen, S. M.
    Hsu, F. C.
    Lin, P. Y.
    Wang, J. H.
    Fang, T. J.
    Kavle, P.
    Lin, Y. J.
    2017 SYMPOSIUM ON VLSI TECHNOLOGY, 2017, : T114 - T115
  • [50] System on Integrated Chips (SoICTM) for 3D Heterogeneous Integration
    Chen, F. C.
    Chen, M. F.
    Chiou, W. C.
    Yu, Doug C. H.
    2019 IEEE 69TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2019, : 594 - 599