Review of Topside Interconnections for Wide Bandgap Power Semiconductor Packaging

被引:19
|
作者
Wang, Lisheng [1 ,2 ,3 ]
Wang, Wenbo [2 ]
Hueting, Raymond J. E. [1 ]
Rietveld, Gert [1 ]
Ferreira, Jan Abraham [1 ,4 ]
机构
[1] Univ Twente, NL-7500 AE Enschede, Netherlands
[2] Shenzhen Inst Wide Bandgap Semicond WinS, Shenzhen 518055, Peoples R China
[3] Guangdong Greater Bay Area Inst Integrated Circui, Guangzhou 510535, Peoples R China
[4] VSL, NL-2629 JA Delft, Netherlands
关键词
Integrated circuit interconnections; Silicon; Silicon carbide; Wires; Bonding; Reliability; Packaging; Challenges; gallium nitride (GaN); interconnection materials; packaging; power semiconductor devices; semiconductor device reliability; silicon carbide (SiC); topside interconnections; wide bandgap (WBG) semiconductors; IGBT MODULES; FUTURE; RELIABILITY; FAILURE; TECHNOLOGY; BEHAVIOR; STRESS; WIRES; JOINT;
D O I
10.1109/TPEL.2022.3200469
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Due to their superior material properties, wide bandgap (WBG) semiconductors enable the application of power electronics at higher temperature operation, higher frequencies, and higher efficiencies compared to silicon (Si). However, the commonly-used aluminum wire bonding as topside interconnection technology prevents WBG semiconductors from reaching their full potential, due to inherent parasitic inductances, large size, heat dissipation, and reliability issues of wire bonding technology. Therefore, this article presents a comprehensive review of topside interconnection technologies of WBG semiconductor power devices and modules. First, the challenges and driving factors for the interconnection of WBG semiconductor dies are discussed. Second, for each widely commercially used WBG semiconductor, i.e., silicon carbide and gallium nitride, technical details and innovative features of state-of-the-art interconnection techniques in packages are reviewed. Then, the majority of existing topside interconnection materials for WBG semiconductors are categorized and compared, followed by a discussion of their advantages, challenges, and failure modes. Based on this elaborate discussion, potential future directions of the interconnection technology development are given. It is concluded that the superior performance of WBG semiconductors can be obtained by combining novel materials with innovative designs for the topside interconnections.
引用
收藏
页码:472 / 490
页数:19
相关论文
共 50 条
  • [1] A Method to Determine Wide Bandgap Power Devices Packaging Interconnections
    Pace, Loris
    Defrance, Nicolas
    De Jaeger, Jean-Claude
    Videt, Arnaud
    Idir, Nadir
    2019 23RD IEEE WORKSHOP ON SIGNAL AND POWER INTEGRITY (SPI 2019), 2019,
  • [2] Wide Bandgap Semiconductor Packaging: Challenges and Innovations in Power Electronics
    Chandrappan, Jayakrishnan
    2023 IEEE INTERNATIONAL 3D SYSTEMS INTEGRATION CONFERENCE, 3DIC, 2023,
  • [3] An Overview of Wide Bandgap Power Semiconductor Device Packaging Techniques for EMI Reduction
    Zhang, Boyi
    Wang, Shuo
    2018 IEEE SYMPOSIUM ON ELECTROMAGNETIC COMPATIBILITY, SIGNAL INTEGRITY AND POWER INTEGRITY (EMC, SI & PI), 2018, : 297 - 302
  • [4] Wide bandgap semiconductor power electronics
    Weitzel, CE
    INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST, 1998, : 51 - 54
  • [5] Wide bandgap semiconductor power devices
    Chow, TP
    Ramungul, N
    Ghezzo, M
    POWER SEMICONDUCTOR MATERIALS AND DEVICES, 1998, 483 : 89 - 102
  • [6] Thermal management and packaging of wide and ultra-wide bandgap power devices: a review and perspective
    Qin, Yuan
    Albano, Benjamin
    Spencer, Joseph
    Lundh, James Spencer
    Wang, Boyan
    Buttay, Cyril
    Tadjer, Marko
    DiMarino, Christina
    Zhang, Yuhao
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2023, 56 (09)
  • [7] Wide Bandgap Semiconductor Opportunities in Power Electronics
    Armstrong, Kristina O.
    Das, Sujit
    Cresko, Joe
    2016 IEEE 4TH WORKSHOP ON WIDE BANDGAP POWER DEVICES AND APPLICATIONS (WIPDA), 2016, : 259 - 264
  • [8] Wide bandgap semiconductor RF power devices
    Weitzel, CE
    1997 IEEE INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS, 1998, : 421 - 426
  • [9] Wide bandgap semiconductor RF power devices
    Weitzel, CE
    COMPOUND SEMICONDUCTORS 1997, 1998, 156 : 421 - 426
  • [10] A Survey of Wide Bandgap Power Semiconductor Devices
    Millan, Jose
    Godignon, Philippe
    Perpina, Xavier
    Perez-Tomas, Amador
    Rebollo, Jose
    IEEE TRANSACTIONS ON POWER ELECTRONICS, 2014, 29 (05) : 2155 - 2163