Review of Topside Interconnections for Wide Bandgap Power Semiconductor Packaging

被引:19
|
作者
Wang, Lisheng [1 ,2 ,3 ]
Wang, Wenbo [2 ]
Hueting, Raymond J. E. [1 ]
Rietveld, Gert [1 ]
Ferreira, Jan Abraham [1 ,4 ]
机构
[1] Univ Twente, NL-7500 AE Enschede, Netherlands
[2] Shenzhen Inst Wide Bandgap Semicond WinS, Shenzhen 518055, Peoples R China
[3] Guangdong Greater Bay Area Inst Integrated Circui, Guangzhou 510535, Peoples R China
[4] VSL, NL-2629 JA Delft, Netherlands
关键词
Integrated circuit interconnections; Silicon; Silicon carbide; Wires; Bonding; Reliability; Packaging; Challenges; gallium nitride (GaN); interconnection materials; packaging; power semiconductor devices; semiconductor device reliability; silicon carbide (SiC); topside interconnections; wide bandgap (WBG) semiconductors; IGBT MODULES; FUTURE; RELIABILITY; FAILURE; TECHNOLOGY; BEHAVIOR; STRESS; WIRES; JOINT;
D O I
10.1109/TPEL.2022.3200469
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Due to their superior material properties, wide bandgap (WBG) semiconductors enable the application of power electronics at higher temperature operation, higher frequencies, and higher efficiencies compared to silicon (Si). However, the commonly-used aluminum wire bonding as topside interconnection technology prevents WBG semiconductors from reaching their full potential, due to inherent parasitic inductances, large size, heat dissipation, and reliability issues of wire bonding technology. Therefore, this article presents a comprehensive review of topside interconnection technologies of WBG semiconductor power devices and modules. First, the challenges and driving factors for the interconnection of WBG semiconductor dies are discussed. Second, for each widely commercially used WBG semiconductor, i.e., silicon carbide and gallium nitride, technical details and innovative features of state-of-the-art interconnection techniques in packages are reviewed. Then, the majority of existing topside interconnection materials for WBG semiconductors are categorized and compared, followed by a discussion of their advantages, challenges, and failure modes. Based on this elaborate discussion, potential future directions of the interconnection technology development are given. It is concluded that the superior performance of WBG semiconductors can be obtained by combining novel materials with innovative designs for the topside interconnections.
引用
收藏
页码:472 / 490
页数:19
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