Accounting for plasma resistance in the interpretation of probe measurements in gas discharge plasma

被引：5
|
作者：
Andreev, S. N. [1 ]
Bernatskiy, A. V. [1 ]
Dyatko, N. A. [1 ,2 ]
Kochetov, I. V. [1 ,2 ]
Lagunov, V. V. [1 ]
Ochkin, V. N. [1 ]
机构：
[1] Russian Acad Sci, PN Lebedev Phys Inst, 53 Leninskiy Prospekt, Moscow 119991, Russia
[2] SRC RF Troitsk Inst Innovat & Fus Res, Troitsk 108840, Moscow, Russia
来源：
VACUUM | 2023年 / 215卷
基金：
俄罗斯科学基金会;
关键词：
Low-temperature plasmas; Langmuir probes; Plasma parameters localization; Hollow cathode; ELECTRON-ENERGY DISTRIBUTION; PARAMETERS;
D O I：
10.1016/j.vacuum.2023.112372
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The influence of the finite plasma resistance between the Langmuir probe and the reference electrode on the results of measurements of the characteristics of low-temperature plasma: the plasma potential, the average electron energy, the electron concentration, and the electron energy distribution function is analyzed. Specific calculations were made for glow discharge conditions supported by a hollow cathode in helium at a pressure of several millibars.
引用
收藏
页数：7
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