Accounting for plasma resistance in the interpretation of probe measurements in gas discharge plasma

被引：5
|
作者：
Andreev, S. N. [1 ]
Bernatskiy, A. V. [1 ]
Dyatko, N. A. [1 ,2 ]
Kochetov, I. V. [1 ,2 ]
Lagunov, V. V. [1 ]
Ochkin, V. N. [1 ]
机构：
[1] Russian Acad Sci, PN Lebedev Phys Inst, 53 Leninskiy Prospekt, Moscow 119991, Russia
[2] SRC RF Troitsk Inst Innovat & Fus Res, Troitsk 108840, Moscow, Russia
来源：
VACUUM | 2023年 / 215卷
基金：
俄罗斯科学基金会;
关键词：
Low-temperature plasmas; Langmuir probes; Plasma parameters localization; Hollow cathode; ELECTRON-ENERGY DISTRIBUTION; PARAMETERS;
D O I：
10.1016/j.vacuum.2023.112372
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The influence of the finite plasma resistance between the Langmuir probe and the reference electrode on the results of measurements of the characteristics of low-temperature plasma: the plasma potential, the average electron energy, the electron concentration, and the electron energy distribution function is analyzed. Specific calculations were made for glow discharge conditions supported by a hollow cathode in helium at a pressure of several millibars.
引用
收藏
页数：7
相关论文
共 50 条
  • [21] Floating double probe and optical emission spectroscopy measurements in a RF discharge plasma
    Kageyama, M
    Ohsone, Y
    Kaneda, T
    Chang, JS
    REPORT OF RESEARCH CENTER OF ION BEAM TECHNOLOGY HOSEI UNIVERSITY, SUPPLEMENT NO.16, 1997, : 41 - 46
  • [22] PROBE AND SPECTRAL MEASUREMENTS OF THE PLASMA PARAMETERS OF AN ARC DISCHARGE WITH A HOLLOW CATHODE.
    Grdlichko, D.P.
    Sakharov, V.B.
    1978, 16 (04): : 597 - 601
  • [23] NOISE OF GAS DISCHARGE PLASMA
    KOJIMA, S
    TAKAYAMA, K
    SHIMAUCHI, A
    JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1954, 9 (05) : 802 - 804
  • [24] Modeling of gas discharge plasma
    Smirnov, B. M.
    PHYSICS-USPEKHI, 2009, 52 (06) : 559 - 571
  • [25] Nonuniform gas discharge plasma
    Eletskii, AV
    Smirnov, BM
    USPEKHI FIZICHESKIKH NAUK, 1996, 166 (11): : 1197 - 1217
  • [26] UNIPOLAR CURRENTS AND ELECTROSTATIC-PROBE CHARACTERISTICS IN A GAS-DISCHARGE PLASMA
    ROGOFF, GL
    LOWRY, JF
    PINSKER, RI
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (03) : 1289 - 1292
  • [27] Determination of gas discharge plasma potential by Langmuir probe using different methods
    Bernatskiy, A. V.
    Draganov, I. I.
    Kochetov, I. V.
    Lagunov, V. V.
    Ochkin, V. N.
    VACUUM, 2024, 225
  • [28] Role of plasma electrons in the generation of a gas discharge plasma
    V. A. Gruzdev
    V. G. Zalesski
    I. S. Rusetski
    Plasma Physics Reports, 2012, 38 : 1056 - 1061
  • [29] Role of plasma electrons in the generation of a gas discharge plasma
    Gruzdev, V. A.
    Zalesski, V. G.
    Rusetski, I. S.
    PLASMA PHYSICS REPORTS, 2012, 38 (13) : 1056 - 1061
  • [30] High-speed plasma measurements with a plasma impedance probe
    Brooks, J. W.
    Tejero, E. M.
    Palliwoda, M. C.
    McDonald, M. S.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2023, 94 (08):
12345