Perovskite stannate La-doped BaSnO3 films for near- and mid-infrared plasmonic applications

被引：2

作者：

Kim, Heungsoo ^{[1
]}

Prestigiacomo, Joseph ^{[1
]}

Bennett, Steven ^{[1
]}

Fields, Shelby ^{[2
]}

Pique, Alberto ^{[1
]}

机构：

[1] Naval Res Lab, Mat Sci & Technol Div, Washington, DC 20375 USA

[2] Naval Res Lab, 4555 Overlook Ave, Washington, DC 20375 USA

来源：

THIN SOLID FILMS | 2024年 / 788卷

关键词：

Barium tin oxide; Perovskite; Epsilon-near-zero; Transparent conducting oxide; Plasmonics;

D O I：

10.1016/j.tsf.2023.140147

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

La-doped BaSnO3 (LBSO) epitaxial thin films were grown on (001) MgO substrates by pulsed laser deposition using a La0.04Ba0.96SnO3 target. The structural, electrical, and optical properties of the LBSO films were inves-tigated as a function of oxygen pressure during deposition. The carrier mobility can be tuned from 13 cm2V- 1s- 1 to 44 cm2V- 1s- 1 by varying oxygen partial pressure from 2 Pa to 12 Pa, respectively. This improved mobility is attributed to the reduced film strain via reducing oxygen defect concentration or reducing off-stoichiometry in the film. The optical permittivity of LBSO films can also be modified as a function of the oxygen pressure during deposition, allowing tuning of their epsilon-near-zero wavelength from 1.9 mu m to 5.6 mu m. These results demonstrate that LBSO thin films grown on MgO can be used for plasmonic devices at mid-wave infrared wavelengths.

引用

页数：8

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