Perovskite stannate La-doped BaSnO3 films for near- and mid-infrared plasmonic applications

被引：2
|
作者：
Kim, Heungsoo [1 ]
Prestigiacomo, Joseph [1 ]
Bennett, Steven [1 ]
Fields, Shelby [2 ]
Pique, Alberto [1 ]
机构：
[1] Naval Res Lab, Mat Sci & Technol Div, Washington, DC 20375 USA
[2] Naval Res Lab, 4555 Overlook Ave, Washington, DC 20375 USA
来源：
THIN SOLID FILMS | 2024年 / 788卷
关键词：
Barium tin oxide; Perovskite; Epsilon-near-zero; Transparent conducting oxide; Plasmonics;
D O I：
10.1016/j.tsf.2023.140147
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
La-doped BaSnO3 (LBSO) epitaxial thin films were grown on (001) MgO substrates by pulsed laser deposition using a La0.04Ba0.96SnO3 target. The structural, electrical, and optical properties of the LBSO films were inves-tigated as a function of oxygen pressure during deposition. The carrier mobility can be tuned from 13 cm2V- 1s- 1 to 44 cm2V- 1s- 1 by varying oxygen partial pressure from 2 Pa to 12 Pa, respectively. This improved mobility is attributed to the reduced film strain via reducing oxygen defect concentration or reducing off-stoichiometry in the film. The optical permittivity of LBSO films can also be modified as a function of the oxygen pressure during deposition, allowing tuning of their epsilon-near-zero wavelength from 1.9 mu m to 5.6 mu m. These results demonstrate that LBSO thin films grown on MgO can be used for plasmonic devices at mid-wave infrared wavelengths.
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页数：8
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