Ultrafast laser composite cutting ultra-thin glass

被引：2
|
作者：
Luo, Yuhang [1 ]
Xie, Xiaozhu [1 ,2 ,3 ]
Zhang, Zucheng [1 ]
Li, Zhaoyan [1 ]
Huang, Yajun [1 ]
机构：
[1] Guangdong Univ Technol, Sch Electromech Engn, Laser Micro Nano Proc Lab, Guangzhou 510006, Peoples R China
[2] Guangdong Univ Technol, Sch Electromech Engn, State Key Lab Precis Elect Mfg Technol & Equipment, Guangzhou 51006, Peoples R China
[3] Guangdong Univ Technol, Dept Expt Teaching, Guangzhou 510006, Peoples R China
来源：
OPTICS COMMUNICATIONS | 2024年 / 555卷
基金：
中国国家自然科学基金;
关键词：
Ultra-thin glass; Laser composite cutting; Internal modification; Surface scribing; BESSEL BEAM; QUALITY;
D O I：
10.1016/j.optcom.2023.130224
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Due to its excellent chemical stability, and scratch resistance, ultra-thin glass (less than 1 mm) has been widely used in the consumer electronics and photovoltaic industries. To meet the requirements of high-quality ultra-thin glass cutting, the composite cutting of ultra-thin glass based on ultrafast laser is proposed which consists of laser internal modification and surface scribing. The effects of laser pulse duration, laser pulse energy, and pulse separation rate on the laser internal modified region of ultrathin glass are studied. The cut quality of the samples under two surface groove structures is compared. The maximum edge strength of 369.07 MPa and the minimum cross -section roughness of 0.148 mu m are obtained by laser composite cutting with the stamp -hole -type groove structure.
引用
收藏
页数：9
相关论文
共 50 条
  • [31] Chemical stability of glass with an ultra-thin disordered carbon coating
    Lee, Hoikwan
    Rajagopalan, Ramakrishnan
    Pantano, Carlo G.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2010, 356 (4-5) : 263 - 269
  • [32] GLASS-TRANSITION BEHAVIOR IN ULTRA-THIN POLYSTYRENE FILMS
    KEDDIE, JL
    JONES, RAL
    ISRAEL JOURNAL OF CHEMISTRY, 1995, 35 (01) : 21 - 26
  • [33] Pilot line for vacuum coating of flexible ultra-thin glass
    Täschner, Kerstin
    JOT, Journal fuer Oberflaechentechnik, 2024, 64 (12): : 14 - 15
  • [34] Flexible electrochromic devices prepared on ultra-thin ITO glass
    Schott, Marco
    Niklaus, Lukas
    Mueller, Christine
    Bozkaya, Beguem
    Giffin, Guinevere A.
    MATERIALS ADVANCES, 2021, 2 (14): : 4659 - 4666
  • [35] Modelling and Microstructural Aspects of Ultra-Thin Sheet Metal Bundle Cutting
    Kaczmarczyk, Jaroslaw
    Kozlowska, Aleksandra
    Grajcar, Adam
    Slawski, Sebastian
    METALS, 2019, 9 (02)
  • [36] A DEVICE FOR CUTTING ULTRA-THIN UNFIXED FROZEN SECTIONS FOR ELECTRON MICROSCOPY
    HODSON, SA
    MARSHALL, J
    JOURNAL OF PHYSIOLOGY-LONDON, 1969, 201 (02): : P63 - &
  • [37] Deposition Technologies for Electronic Systems Based on Ultra-Thin Glass
    Knoch, Philip
    Meier, Karsten
    Luniak, Marco
    Bock, Karlheinz
    2020 43RD INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE), 2020,
  • [38] Surface integrity analysis of ultra-thin glass molding process
    Zhang, Zhen
    Yang, Wei
    Ming, Wuyi
    Yin, Ling
    Liao, Dunming
    Zhang, Guojun
    CERAMICS INTERNATIONAL, 2021, 47 (21) : 30584 - 30597
  • [39] Polysilicon thin film developed on ultra-thin flexible glass for temperature sensor
    Quintana, Juan M.
    Nguyen, Thinh H.
    Ahn, Chong H.
    2020 IEEE SENSORS, 2020,
  • [40] Defect annealing in ultra-thin polycrystalline silicon films on glass: Rapid thermal versus laser processing
    Li, Wei
    Varlamov, Sergey
    Dore, Jonathon
    Green, Martin
    MATERIALS LETTERS, 2013, 107 : 1 - 4
12345