Ultrafast laser composite cutting ultra-thin glass

被引：2
|
作者：
Luo, Yuhang [1 ]
Xie, Xiaozhu [1 ,2 ,3 ]
Zhang, Zucheng [1 ]
Li, Zhaoyan [1 ]
Huang, Yajun [1 ]
机构：
[1] Guangdong Univ Technol, Sch Electromech Engn, Laser Micro Nano Proc Lab, Guangzhou 510006, Peoples R China
[2] Guangdong Univ Technol, Sch Electromech Engn, State Key Lab Precis Elect Mfg Technol & Equipment, Guangzhou 51006, Peoples R China
[3] Guangdong Univ Technol, Dept Expt Teaching, Guangzhou 510006, Peoples R China
来源：
OPTICS COMMUNICATIONS | 2024年 / 555卷
基金：
中国国家自然科学基金;
关键词：
Ultra-thin glass; Laser composite cutting; Internal modification; Surface scribing; BESSEL BEAM; QUALITY;
D O I：
10.1016/j.optcom.2023.130224
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Due to its excellent chemical stability, and scratch resistance, ultra-thin glass (less than 1 mm) has been widely used in the consumer electronics and photovoltaic industries. To meet the requirements of high-quality ultra-thin glass cutting, the composite cutting of ultra-thin glass based on ultrafast laser is proposed which consists of laser internal modification and surface scribing. The effects of laser pulse duration, laser pulse energy, and pulse separation rate on the laser internal modified region of ultrathin glass are studied. The cut quality of the samples under two surface groove structures is compared. The maximum edge strength of 369.07 MPa and the minimum cross -section roughness of 0.148 mu m are obtained by laser composite cutting with the stamp -hole -type groove structure.
引用
收藏
页数：9
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