On-chip mid-infrared optical sensing with GeSbSe waveguides and resonators

被引：1

作者：

Grayson, Michael ^{[1
]}

Krueper, Greg ^{[2
]}

Xu, Bo ^{[2
]}

Zohrabi, Mo ^{[1
]}

Hjelme, Dag ^{[3
]}

Gopinath, Juliet T. ^{[1
,2
,4
]}

Park, Wounjhang ^{[1
,4
]}

机构：

[1] Univ Colorado, Dept Elect Comp & Energy Engn, Boulder, CO 80309 USA

[2] Univ Colorado, Dept Phys, Boulder, CO 80309 USA

[3] Norwegian Univ Sci & Technol, Dept Elect Syst, Trondheim, Norway

[4] Univ Colorado, Mat Sci & Engn Program, Boulder, CO 80309 USA

来源：

OPTICS EXPRESS | 2023年 / 31卷 / 02期

关键词：

MU-M; CHALCOGENIDE; DEHYDROGENASE; PURIFICATION; SPECTROSCOPY; FORMALDEHYDE; INDEX;

D O I：

10.1364/OE.476186

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We fabricated single mode Ge28Sb12Se60 waveguides and resonators using e-beam lithography and achieved a propagation loss of 3.88 dB/cm at 3.66 mu m. We compared BCl3 and CHF3 etch chemistries and determined CHF3 produced 1.5 dB/cm higher propagation losses at 3.6 mu m due to C-H bond absorption. We use fabricated waveguides to detect an aromatic aldehyde dissolved in a non-polar solvent with a limit of detection of 1.09 mu mol/mL. We then reduce this detection limit to 0.25 mu mol/mL using the enhancement produced by a chalcogenide ring resonator.

引用

页码：877 / 889

页数：13

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