Design of On-Chip Multi-Slot Chalcogenide Waveguide for Mid-Infrared Methane Sensing

被引：0
|
作者：
Ma, Ningbo [1 ]
Qin, Zhengkun [1 ]
Pi, Mingquan [2 ]
Wang, Xueying [2 ]
Zheng, Chuantao [2 ]
Min, Yuting [2 ]
Zhao, Huan [2 ]
Song, Mingxing [1 ]
机构：
[1] Jilin Normal Univ, Coll Informat Technol, Siping, Peoples R China
[2] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun, Peoples R China
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2024年 / 66卷 / 11期
关键词：
chalcogenide waveguide; methane sensing; mid-infrared; multi-slot; power confinement factor; SENSOR;
D O I：
10.1002/mop.70036
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A chalcogenide (ChG) multi-slot waveguide gas sensor with ChG as the core layer and silicon dioxide (SiO2) as the under-cladding layer is proposed. Multi-slot waveguide can be used in the mid-infrared gas measurement. The optimized power confinement factor (PCF) of the ChG multi-slot waveguide can be up to 41.3%, which is similar to 20% higher than that of the optimized single-slot waveguide. At the absorption line located at 3.291 mu m for methane (CH4) measurement, the limits of detection (LoD) of single-slot, double-slot, triple-slot, quadruple-slot waveguide sensors are determined to be 68.9, 57.4, 52, 48.6 parts per million (ppm), respectively. Compared with other waveguide sensors in the mid-infrared, the PCF of the proposed multi-slot ChG/SiO2 waveguide sensor is enhanced by five times, which has the potential for highly sensitive gas sensing.
引用
收藏
页数：5
相关论文
共 50 条
  • [1] Irradiation of on-chip chalcogenide glass waveguide mid-infrared gas sensor
    Su, Peter
    Han, Zhaohong
    Kita, Derek
    Singh, Vivek
    Du, Qingyang
    Kimerling, Lionel
    Hu, Juejun
    Agarwal, Anu
    Lin, Pao Tai
    Richardson, Kathleen
    Tan, Dawn T. H.
    2016 IEEE SENSORS, 2016,
  • [2] On-chip mid-infrared gas detection using chalcogenide glass waveguide
    Han, Z.
    Lin, P.
    Singh, V.
    Kimerling, L.
    Hu, J.
    Richardson, K.
    Agarwal, A.
    Tan, D. T. H.
    APPLIED PHYSICS LETTERS, 2016, 108 (14)
  • [3] On-chip chalcogenide glass waveguide-integrated mid-infrared PbTe detectors
    Han, Z.
    Singh, V.
    Kita, D.
    Monmeyran, C.
    Becla, P.
    Su, P.
    Li, J.
    Huang, X.
    Kimerling, L. C.
    Hu, J.
    Richardson, K.
    Tan, D. T. H.
    Agarwal, A.
    APPLIED PHYSICS LETTERS, 2016, 109 (07)
  • [4] Chalcogenide based rib waveguide for compact on-chip supercontinuum sources in mid-infrared domain
    Saini, Than Singh
    Tiwari, Umesh Kumar
    Sinha, Ravindra Kumar
    INFRARED SENSORS, DEVICES, AND APPLICATIONS VII, 2017, 10404
  • [5] Mid-Infrared on-Chip Soliton Self-frequency Shift in Chalcogenide Glass Waveguide
    Yang, Lei
    Wei, Zibo
    Xia, Kai
    Yang, Zhen
    Wang, Haoxian
    Yang, Peilong
    Zhang, Wei
    Wang, Rongping
    Dai, Shixun
    Gan, Fuwan
    Kang, Zhe
    Xu, Peipeng
    LASER & PHOTONICS REVIEWS, 2025, 19 (05)
  • [6] Mid-Infrared Opto-nanofluidic Slot-Waveguide for Label-free On-Chip Chemical Sensing
    Lin, Pao Tai
    Kwok, Sen Wai
    Lin, Hao-Yu Greg
    Singh, Vivek
    Kimerling, Lionel C.
    Whitesides, George M.
    Tan, Dawn T. H.
    Agarwal, Anu
    2014 IEEE PHOTONICS SOCIETY SUMMER TOPICAL MEETING SERIES, 2014, : 65 - 66
  • [7] A niobium pentoxide waveguide sensor for on-chip mid-infrared absorption spectroscopic methane measurement
    Bi, Ran
    Pi, Mingquan
    Zheng, Chuantao
    Zhao, Huan
    Liang, Lei
    Song, Fang
    Wang, Dingdi
    Zhang, Yu
    Wang, Yiding
    Tittel, Frank K.
    SENSORS AND ACTUATORS B-CHEMICAL, 2023, 382
  • [8] Design, Analysis, and Optimization of a Plasmonic Slot Waveguide for Mid-Infrared Gas Sensing
    Saeidi, Parviz
    Jakoby, Bernhard
    Puhringer, Gerald
    Tortschanoff, Andreas
    Stocker, Gerald
    Spettel, Jasmin
    Dubois, Florian
    Grille, Thomas
    Jannesari, Reyhaneh
    NANOMATERIALS, 2022, 12 (10)
  • [9] Mid-infrared on-chip sensing technologies (Conference Presentation)
    Mizaikoff, Boris
    NOVEL IN-PLANE SEMICONDUCTOR LASERS XVI, 2017, 10123
  • [10] Mid-Infrared Spectrometer Using Opto-Nanofluidic Slot-Waveguide for Label-Free On-Chip Chemical Sensing
    Lin, Pao Tai
    Kwok, Sen Wai
    Lin, Hao-Yu Greg
    Singh, Vivek
    Kimerling, Lionel C.
    Whitesides, George M.
    Agarwal, Anu
    NANO LETTERS, 2014, 14 (01) : 231 - 238
12345