Characterization of ZnO Crystals of Various Geometries Grown by Mist Chemical Vapor Deposition on a c-Plane Sapphire Substrate

ZnO nanowires, nanowalls, and thin-film-like crystals are grown simultaneously on a c-plane sapphire substrate by mist chemical vapor deposition (mist-CVD) at a high growth temperature. Mist-CVD is expected to be a potentially low-environment-impact and low-cost crystal growth technique. Using mist-CVD techniques, a spatial distribution of crystal growth is obtained owing to equipment configurations that enable the simultaneous fabrication of ZnO crystals of various geometries. Their crystallinity and photoluminescence properties are examined to clarify their potential applications and to investigate low-cost photonic applications based on these properties. Mist chemical vapor deposition (mist-CVD) is expected to be potentially low-environment-impact and low-cost crystal growth technique, and ZnO and related crystals have been investigated for use as UV-range optical materials. Herein, ZnO nanowires, nanowalls, and thin-film-like crystals are grown by mist-CVD, and their crystallinity and photoluminescence properties are examined to clarify their potential applications and to investigate low-cost photonic applications based on these properties.image (c) 2024 WILEY-VCH GmbH