Characterization of the VOx thin films grown on c-plane sapphire substrates by MOD

被引：0
|
作者：
Wada H. [1 ]
Koike K. [1 ]
Yano M. [1 ]
机构：
[1] Osaka Institute of Technology, 5-16-1 Ohmiya, Asahi-ku Osaka
来源：
IEEJ Transactions on Fundamentals and Materials | 2021年 / 141卷 / 05期
关键词：
Dimming rate; Metal-organic decomposition (MOD); Orientation factor; Smart window; Vanadium oxide (VOx);
D O I：
10.1541/ieejfms.141.345
中图分类号：
学科分类号：
摘要：
Vanadium oxide (VOx) thin films were grown on c-plane sapphire substrates by metal-organic decomposition (MOD). Their crystallinity and optical characteristics were evaluated by XRD, XPS, AFM, LSM and a spectrophotometer. The crystallinity of the VOx thin films were improved in adjusting the O reduction by controlling the firing time in N2 atmosphere and a spin coating rotation speed. As a result, in the optimized VOx samples under a firing temperature of 580°C after calcining at 300°C with 6000 rpm coating speed, the growth of polycrystalline fine nanoparticles of a single composition was confirmed which has good thermochromic characteristics. © 2021 The Institute of Electrical Engineers of Japan.
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页码：345 / 350
页数：5
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