共 50 条
- [21] Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2020, 38 (02):
- [22] Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures 12TH INTERNATIONAL CONFERENCE ON GAS DISCHARGE PLASMAS AND THEIR APPLICATIONS, 2015, 652
- [24] Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021, 39 (03):
- [29] Plasma-enhanced atomic layer deposition for plasmonic TiN NANOPHOTONIC MATERIALS XIII, 2016, 9919
- [30] Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2019, 37 (02):