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- [31] Hyperspectral optical imaging of tissues using silicon micro-machined micro-channel arrays PHOTONICS NORTH 2010, 2010, 7750
- [32] Micro-machined tunable optical filters with optimized band-pass spectrum BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 1494 - 1497
- [33] Silicon Micro-machined Optical Microphone Based On Fizeau Interferometry And PGC Demodulation 2012 INTERNATIONAL CONFERENCE ON INDUSTRIAL CONTROL AND ELECTRONICS ENGINEERING (ICICEE), 2012, : 1053 - 1056
- [35] HIGH-ENERGY DENSITY MICRO-MACHINED CELLULAR ARRAYS OF ELECTROSTATIC ACTUATORS 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 1870 - 1873
- [37] Self-temperature compensation for high quality factor micro-machined gyroscope Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2013, 21 (11): : 2870 - 2876
- [38] Electroplated nickel based micro-machined disk resonators for high frequency applications Microsystem Technologies, 2013, 19 : 525 - 535
- [39] Electroplated nickel based micro-machined disk resonators for high frequency applications MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 19 (04): : 525 - 535
- [40] High Voltage Excitation and Nonlinear Transmission of a 16 MHz AlN-Based Piezoelectric Micro-Machined Ultrasonic Transducer 2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2018,