Micro-machined tunable optical filters with optimized band-pass spectrum

被引：0

作者：

Hohlfeld, D ^{[1
]}

Zappe, H ^{[1
]}

机构：

[1] Univ Freiburg, Lab Microopt, Inst Microsyst Technol, D-79110 Freiburg, Germany

来源：

BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel MEMS-based tunable optical filter structure is presented which for the first time combines the advantages of an optimized filter shape function with tunability. Such a filter is essential for monitoring and reconfiguration of optical communication networks. The device is based on a Fabry-Perot interferometer employing multiple solid-state silicon cavities and dielectric Bragg mirrors. It is fabricated as a self-supporting membrane with thin film metal resistors using silicon MEMS technology.

引用

页码：1494 / 1497

页数：4

共 50 条

[1] Optimized Coupled Band-Pass Filters
Mijat, Neven
Jurisic, Drazen
2014 37TH INTERNATIONAL CONVENTION ON INFORMATION AND COMMUNICATION TECHNOLOGY, ELECTRONICS AND MICROELECTRONICS (MIPRO), 2014, : 150 - 155
[2] ON TUNABLE REJECTION IN BAND-PASS SAW FILTERS
LOSEV, OS
SVESHNIKOV, BV
RADIOTEKHNIKA I ELEKTRONIKA, 1994, 39 (05): : 854 - 864
[3] Tunable Band-pass Filters Using Mems Switches
Guo, Xinglong
Ou'yang, Weixia
Wang, Chao
Lai, Zongsheng
2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4, 2008, : 2520 - 2523
[4] Narrow optical band-pass filters and nanoplasmonics
Martynov, Y. B.
Nazmitdinov, R. G.
Gladyshev, P. P.
Tanachev, I. A.
INTERNATIONAL CONFERENCE ON THEORETICAL PHYSICS: DUBNA-NANO 2012, 2012, 393
[5] POLYMERIC FILM OPTICAL BAND-PASS FILTERS
ELTSOV, AV
SOKOLOVA, NB
SHULGINA, ES
DMITRIEVA, NM
RUSSIAN JOURNAL OF APPLIED CHEMISTRY, 1993, 66 (07) : 1236 - 1244
[6] Miniaturized Micro-Strip Band-Pass Filters
Dennis, Nithin J.
John, Reneetta Sera
Babu, Sanjo
Chandran, Sreerag
Azeez, Maleeha Abdul
2022 IEEE INTERNATIONAL POWER AND RENEWABLE ENERGY CONFERENCE, IPRECON, 2022,
[7] Tunable band-pass plasmonic waveguide filters with nanodisk resonators
Lu, Hua
Liu, Xueming
Mao, Dong
Wang, Leiran
Gong, Yongkang
OPTICS EXPRESS, 2010, 18 (17): : 17922 - 17927
[8] TUNABLE BAND-PASS FILTERS EMPLOYING STRETCHABLE ELECTRONIC COMPONENTS
Slipher, Geoffrey A.
Mrozek, Randy A.
Shumaker, Justin L.
PROCEEDINGS OF THE ASME CONFERENCE ON SMART MATERIALS, ADAPTIVE STRUCTURES AND INTELLIGENT SYSTEMS, VOL 1, 2012, : 185 - 192
[9] TUNABLE MICROWAVE AND MILLIMETER-WAVE BAND-PASS FILTERS
UHER, J
HOEFER, WJR
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1991, 39 (04) : 643 - 653
[10] Integration of optimized low-pass filters in band-pass filters for out-of-band improvement.
Quendo, C
Person, C
Rius, E
Ney, M
2001 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2001, : 1309 - 1312

← 1 2 3 4 5 →