Micro-machined tunable optical filters with optimized band-pass spectrum

被引：0
|
作者：
Hohlfeld, D [1 ]
Zappe, H [1 ]
机构：
[1] Univ Freiburg, Lab Microopt, Inst Microsyst Technol, D-79110 Freiburg, Germany
来源：
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2003年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel MEMS-based tunable optical filter structure is presented which for the first time combines the advantages of an optimized filter shape function with tunability. Such a filter is essential for monitoring and reconfiguration of optical communication networks. The device is based on a Fabry-Perot interferometer employing multiple solid-state silicon cavities and dielectric Bragg mirrors. It is fabricated as a self-supporting membrane with thin film metal resistors using silicon MEMS technology.
引用
收藏
页码：1494 / 1497
页数：4
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