共 50 条
- [5] Thickness Dependence on Electrical and Reliability Properties for Dense and Porous Low Dielectric Constant Materials 2015 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS), 2015,
- [7] Low-damage damascene patterning using porous inorganic low-dielectric-constant materials JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (5A): : 2976 - 2981
- [9] Nanoporous, low-dielectric constant organosilicate materials derived from inorganic polymer blends POLYMERS FOR MICROELECTRONICS AND NANOELECTRONICS, 2004, 874 : 144 - 160