共 50 条
- [21] Structural and Tribological Properties of Polyimide/Al2O3/SiO2 Composites in Atomic Oxygen Environment JOURNAL OF MACROMOLECULAR SCIENCE PART B-PHYSICS, 2012, 51 (1-3): : 224 - 234
- [23] Quasi atomic layer etching of SiO2 using plasma fluorination for surface cleaning JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018, 36 (01):
- [24] Atomic layer etching of SiO2 by alternating an O2 plasma with fluorocarbon film deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2017, 35 (01):
- [25] Ultraviolet laser damage properties of single-layer SiO2 film grown by atomic layer deposition OPTICAL MATERIALS EXPRESS, 2020, 10 (08): : 1981 - 1990
- [30] Atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material OPTICAL SYSTEMS DESIGN 2015: ADVANCES IN OPTICAL THIN FILMS V, 2015, 9627