Amorphous Ga2O3 Thin-Film Phototransistors for Imaging and Logic Illustration

被引:8
|
作者
Ji, Xingqi [1 ]
Yuan, Yuzhuo [1 ]
Yin, Xuemei [1 ]
Yan, Shiqi [1 ]
Ding, Zijian [1 ]
Zhang, Jiawei [1 ]
Xin, Qian [1 ]
Song, Aimin [1 ,2 ]
机构
[1] Shandong Univ, Shandong Technol Ctr Nanodevices & Integrat, Sch Microelect, Jinan 250100, Peoples R China
[2] Univ Manchester, Sch Elect & Elect Engn, Manchester M13 9PL, England
基金
中国国家自然科学基金; 英国工程与自然科学研究理事会;
关键词
Amorphous gallium oxide (a-Ga2O3); thin-film phototransistors; imaging; logic gate; BLIND; PHOTODETECTORS; HETEROJUNCTION;
D O I
10.1109/LED.2023.3240540
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Amorphous Ga2O3 (a-Ga2O3) thin-film phototransistors were fabricated by sputtering and achieved excellent solar-blind detection properties with superhigh responsivity of 2.0 x 105 A center dot W-1, ultrahigh detectivity of 4.9 x 10(18) Jones, high external quantum efficiency of 9.9 x 107%, and high photo-to-dark current ratio of 2.9 x 10(8). These values are considerably high compared with those of the reported a-Ga2O3 phototransistors, and are comparable to or even better than those of the reported high-performance crystalline beta-Ga2O3 phototransistors. A 10 x 10 a-Ga2O3 thin-film phototransistor array was fabricated, showing a clear "SDU" pattern with high contrast. In addition, the light control logic AND and OR gates based on a-Ga2O3 thin-film phototransistors were realized by utilizing two light spikes as logic input signals. Our work demonstrates that the a-Ga2O3 thinfilm phototransistors have great potential in large area photosensitive circuits with high detection sensitivity and high signal-to-noise ratio.
引用
收藏
页码:436 / 439
页数:4
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