共 50 条
- [31] ION-BEAM LITHOGRAPHY: A PROMISING TECHNIQUE FOR THE PATTERNING OF GRAPHENE OXIDE FOIL PROCEEDINGS OF THE 17TH INTERNATIONAL CONFERENCE ON ION SOURCES, 2018, 2011
- [32] Hybrid Approach to Optical CD Metrology of Directed Self-Assembly Lithography METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVII, 2013, 8681
- [33] Nanopatterning of diblock copolymer directed self-assembly lithography with wet development JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2012, 11 (03):
- [35] Nanopatterning of diblock copolymer directed self-assembly lithography with wet development ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES III, 2011, 7970
- [37] MEV ION-BEAM LITHOGRAPHY OF PMMA NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 77 (1-4): : 169 - 174
- [40] A BILEVEL RESIST FOR ION-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (03): : 879 - 883