Growth of β-Ga2O3 and ε/κ-Ga2O3 on AlN(0001) by molecular-beam epitaxy (vol 11, 111113,2023)

被引：0
|
作者：
Raghuvansy, Sushma [1 ]
Mccandless, Jon P. [1 ]
Schowalter, Marco [1 ]
Karg, Alexander [1 ]
Alonso-Orts, Manuel [1 ,3 ]
Williams, Martin S. [1 ]
Tessarek, Christian [1 ]
Figge, Stephan [1 ]
Nomoto, Kazuki [2 ]
Xing, Huili Grace [2 ,4 ]
Schlom, Darrell G. [4 ,5 ,6 ]
Rosenauer, Andreas [1 ,3 ]
Jena, Debdeep [2 ,4 ]
Eickhoff, Martin [1 ,3 ]
Vogt, Patrick [1 ,4 ]
机构：
[1] Univ Bremen, Inst Solid State Phys, Otto-Hahn-Allee 1, D-28359 Bremen, Germany
[2] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA
[3] Univ Bremen, MAPEX Ctr Mat & Proc, D-28359 Bremen, Germany
[4] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
[5] Cornell Univ, Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA
[6] Leibniz Inst Kristallzuchtung, Max-Born-Str 2, D-12489 Berlin, Germany
来源：
APL MATERIALS | 2024年 / 12卷 / 01期
关键词：
D O I：
10.1063/5.0192370
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页数：2
相关论文
共 50 条
  • [1] Growth of β-Ga2O3 and (sic)/κ-Ga2O3 on AlN(0001) by molecular-beam epitaxy
    Raghuvansy, Sushma
    Mccandless, Jon P.
    Schowalter, Marco
    Karg, Alexander
    Alonso-Orts, Manuel
    Williams, Martin S.
    Tessarek, Christian
    Figge, Stephan
    Nomoto, Kazuki
    Xing, Huili Grace
    Schlom, Darrell G.
    Rosenauer, Andreas
    Jena, Debdeep
    Eickhoff, Martin
    Vogt, Patrick
    APL MATERIALS, 2023, 11 (11)
  • [2] Adsorption-controlled growth of Ga2O3 by suboxide molecular-beam epitaxy
    Vogt, Patrick
    Hensling, Felix V. E.
    Azizie, Kathy
    Chang, Celesta S.
    Turner, David
    Park, Jisung
    McCandless, Jonathan P.
    Paik, Hanjong
    Bocklund, Brandon J.
    Hoffman, Georg
    Bierwagen, Oliver
    Jena, Debdeep
    Xing, Huili G.
    Mou, Shin
    Muller, David A.
    Shang, Shun-Li
    Liu, Zi-Kui
    Schlom, Darrell G.
    APL MATERIALS, 2021, 9 (03)
  • [3] Indium: A surfactant for the growth of ?/?-Ga2O3 by molecular beam epitaxy
    Karg, Alexander
    Hinz, Alexander
    Figge, Stephan
    Schowalter, Marco
    Vogt, Patrick
    Rosenauer, Andreas
    Eickhoff, Martin
    APL MATERIALS, 2023, 11 (09)
  • [4] Thermodynamic analysis of β-Ga2O3 growth by molecular beam epitaxy
    Togashi, Rie
    Ishida, Haruka
    Goto, Ken
    Higashiwaki, Masataka
    Kumagai, Yoshinao
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2023, 62 (01)
  • [5] Molecular Beam Epitaxy of Al-Polar Wurtzite AlN(0001) on β-Ga2O3(-201) Substrates
    Seguret, Andy
    Okuno, Hanako
    Roussel, Herve
    Rouviere, Jean-Luc
    Bujak, Anna
    Ferrandis, Philippe
    Bellet-Amalric, Edith
    Consonni, Vincent
    Monroy, Eva
    ACS MATERIALS LETTERS, 2025, 7 (02): : 660 - 667
  • [6] β-Ga2O3 growth by plasma-assisted molecular beam epitaxy
    Tsai, Min-Ying
    Bierwagen, Oliver
    White, Mark E.
    Speck, James S.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2010, 28 (02): : 354 - 359
  • [7] Nucleation Window of Ga2O3 and In2O3 for Molecular Beam Epitaxy on (0001) Al2O3 (vol 23, pg 4435, 2023)
    Karg, Alexander
    Bich, Justin A.
    Messow, Adrian
    Schowalter, Marco
    Figge, Stephan
    Rosenauer, Andreas
    Vogt, Patrick
    Eickhoff, Martin
    CRYSTAL GROWTH & DESIGN, 2023, 23 (11) : 8468 - 8468
  • [8] Nucleation Window of Ga2O3 and In2O3 for Molecular Beam Epitaxy on (0001) Al2O3
    Karg, Alexander
    Bich, Justin Andreas
    Messow, Adrian
    Schowalter, Marco
    Figge, Stephan
    Rosenauer, Andreas
    Vogt, Patrick
    Eickhoff, Martin
    CRYSTAL GROWTH & DESIGN, 2023, 23 (06) : 4435 - 4441
  • [9] Growth of α-Ga2O3 on α-Al2O3 by conventional molecular-beam epitaxy and metal-oxide-catalyzed epitaxy
    McCandless, J. P.
    Rowe, D.
    Pieczulewski, N.
    Protasenko, V.
    Alonso-Orts, M.
    Williams, M. S.
    Eickhoff, M.
    Xing, H. G.
    Muller, D. A.
    Jena, D.
    Vogt, P.
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2023, 62 (SF)
  • [10] MOCVD Growth of β-Ga2O3 on (001) Ga2O3 Substrates
    Meng, Lingyu
    Yu, Dongsu
    Huang, Hsien-Lien
    Chae, Chris
    Hwang, Jinwoo
    Zhao, Hongping
    CRYSTAL GROWTH & DESIGN, 2024, 24 (09) : 3737 - 3745
12345