Mixed stitching interferometry with correction from one-dimensional profile measurements for high-precision X-ray mirrors

被引：4
|
作者：
Wu, Qiaoyu [1 ,2 ,3 ]
Huang, Qiushi [1 ,2 ,3 ]
Yu, Jun [1 ,2 ,3 ]
Zhu, Yifan [1 ,2 ,3 ]
Gu, Weichen [1 ,2 ,3 ]
Sheng, Pengfeng [1 ,2 ,3 ]
He, Yumei [4 ]
Luo, Hongxin [4 ]
Zhang, Zhong [1 ,2 ,3 ]
Wang, Zhanshan [1 ,2 ,3 ]
机构：
[1] Tongji Univ, Inst Precis Opt Engn IPOE, Sch Phys Sci & Engn, Key Lab Adv Microstruct Mat,Minist Educ, Shanghai 200092, Peoples R China
[2] Tongji Univ, Shanghai Profess Tech Serv Platform Full Spectrum, Shanghai 200092, Peoples R China
[3] Tongji Univ, Shanghai Frontiers Sci Ctr Digital Opt, Shanghai 200092, Peoples R China
[4] Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai 201210, Peoples R China
来源：
OPTICS EXPRESS | 2023年 / 31卷 / 10期
基金：
中国国家自然科学基金;
关键词：
METROLOGY;
D O I：
10.1364/OE.486829
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This work presents a mixed stitching interferometry method with correction from one-dimensional profile measurements. This method can correct the error of stitching angles among different subapertures using the relatively accurate one-dimensional profiles of the mirror, e.g., provided by the contact profilometer. The measurement accuracy is simulated and analyzed. The repeatability error is decreased by averaging multiple measurements of the one-dimensional profile and using multiple profiles at different measurement positions. Finally, the measurement result of an elliptical mirror is presented and compared with the global algorithm-based stitching, and the error of the original profiles is reduced to one-third. This result shows that this method can effectively suppress the accumulation of stitching angle errors in classic global algorithm -based stitching. The accuracy of this method can be further improved by using high-precision one-dimensional profile measurements such as the nanometer optical component measuring machine (NOM).(c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码：16330 / 16347
页数：18
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