Present status of upgraded long trace profiler for characterization of high-precision X-ray mirrors at SPring-8

被引：3
|
作者：
Senba, Y. [1 ]
Kishimoto, H. [1 ]
Ohashi, H. [1 ]
Yumoto, H. [1 ]
Goto, S. [1 ]
Ishikawa, T. [2 ]
机构：
[1] Japan Synchrotron Radiat Res Inst, 1-1-1 Koto, Sayo, Hyogo 6795198, Japan
[2] RIKEN SPring 8 Ctr, Mikazuki, Hyogo 6795148, Japan
来源：
ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS III | 2010年 / 7801卷
关键词：
Long trace profiler; Surface profile measurement; Optical metrology; Stitching measurement; X-ray mirror; Synchrotron radiation;
D O I：
10.1117/12.861021
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The long trace profiler (LTP) at SPring-8 has been fully upgraded in-house. The environmental temperature and air pressure supplied to the air bearing were stabilized. An intensity-stabilized He-Ne laser, air-bearing slider, optical elements, and a detector were replaced to improve the stability and resolution of slope measurement. The newly installed device, a motorized swivel stage, enables automatic stitching measurements. Two steep mirrors whose range of slope is wider than the angular range of the LTP were measured by using the stitching technique.
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页数：9
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