Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses

被引：0

作者：

张广鸣 ^{[1
]}

李欣 ^{[1
]}

姜澜 ^{[1
]}

史雪松 ^{[1
]}

张开虎 ^{[1
]}

曹强 ^{[1
]}

陆永枫 ^{[2
]}

机构：

[1] Laser Micro/Nano Fabrication Laboratory,School of Mechanical Engineering,Beijing Institute of Technology

[2] Department of Electrical Engineering,University of Nebraska-Lincoln

来源：

Chinese Optics Letters | 2015年 / 13卷 / 04期

基金：

中国国家自然科学基金;

关键词：

D O I：

暂无

中图分类号：

TN248 [激光器];

学科分类号：

0803 ; 080401 ; 080901 ;

摘要：

A surprising phenomenon can be discovered by using femtosecond double-pulse ablation of silicon and germanium in ethanol. The ablation areas present an oscillation increase phenomenon when the pulse delay increases from 200 fs to 1 ps in the fluence range of 0.5–0.6 J∕cm2. In contrast, the ablation areas exhibit an oscillation decrease phenomenon as the pulse delay increases when the laser fluence F < 0.5 J∕cm2, which is consistent with the results of the experiment in air. It is considered that the adjustment of the photon–electron coupling efficiency by pulse train technology plays an important role in the ablation process.

引用

页码：45 / 48

页数：4

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