A 16-bit sigma–delta modulator applied in micro-machined inertial sensors

被引：0

作者：

徐宏林 ^{[1
]}

付强 ^{[1
]}

刘鸿娜 ^{[1
]}

尹亮 ^{[1
]}

王鹏飞 ^{[1
]}

刘晓为 ^{[1
,2
]}

机构：

[1] MEMS Center, Harbin Institute of Technology

来源：

Journal of Semiconductors | 2014年 / 04期

基金：

中国国家自然科学基金;

关键词：

analog-to-digital converter; low-distortion low-pass sigma–delta modulator; micro-machined inertial sensor;

D O I：

暂无

中图分类号：

TP212 [发送器（变换器）、传感器];

学科分类号：

080202 ;

摘要：

A fourth-order low-distortion low-pass sigma–delta (∑⊿/ modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 m CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm2 with 23 pads. The experimental results indicate a signal-to-noise ratio (SNR) of 100 dB and dynamic range (DR) of 103 dB at an oversampling rate (OSR) of 128 with the input signal amplitude of –3.88 dBFS at 9.8 kHz; the power consumption is 15 mW at a 5 V supply.

引用

页码：132 / 137

页数：6

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