Development of micro-machined three-axis sensors in venture business

被引：0
|
作者：
Okada, K [1 ]
Taniguchi, N [1 ]
Takagi, S [1 ]
Itano, H [1 ]
机构：
[1] WACOH Corp, Omiya, Saitama, Japan
来源：
TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年
关键词：
3-axis; acceleration sensor; angular verocity sensor;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
Our company was founded in 1988 and has specialized in the development of sensors ever since. The sensors that have already been developed are the 3-axis acceleration sensor, 3-axis force sensor, 3-axis angular velocity sensor and 5-axis motion sensor. In this paper, a piezoresistance type 3-axis acceleration sensor and an electrostatic capacitance type 3-axis acceleration sensor which use micro-machining technology, and a piezoelectric type 3-axis acceleration sensor using piezoelectric ceramic technology are presented. Furthermore, a micro-machined 5-axis motion sensor which was recently successfully developed is also explained.
引用
收藏
页码：1280 / 1283
页数：4
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