Micro-Machined Gas-Pendulum Dual-Axis Tilt Sensors

This paper presents the elements of theory, principle, design of technics process, and simulation results of micro-machined gas-pendulum dual-axis tilt sensors, which are used to measure the obliquity of moving carriers. This paper deduces gas-pendulum theory and characteristic under the continuous medium hypothesis [1], simulates the velocity vector distribution of hot airflow in the hermetic chamber by ANSYS software, and introduces the principle of micro-machined gas-pendulum dual-axis tilt sensors. This paper puts forward an original design scheme to improve the performances greatly through optimizing the chamber volume, distance between heater and temperature detectors and so on. Output signal of the device should be conditioned and compensated to receive better performances.