A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition

被引：0

作者：

赖秀琼 ^{[1
]}

陈俊芳 ^{[1
]}

符斯列 ^{[1
]}

李炜 ^{[1
]}

张茂平 ^{[1
]}

史磊 ^{[1
]}

杨春林 ^{[1
]}

机构：

[1] School of Physics and Telecommunication Engineering,South China Normal University Guangdong 510631,China

来源：

Plasma Science and Technology | 2007年 / 9卷 / 04期

关键词：

plasma density; Langmuir probe; OES; diamond-like carbon thin films;

D O I：

暂无

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

In order to deposit good films,we need to study the uniformity of plasma density andthe plasma density under different gas pressures and powers.The plasma density was diagnosedby a Langmuir probe.The optical emission spectroscopy(OES)of CH4and H2discharge wasobtained with raster spectroscopy,with characteristic peaks of H and CH achieved.Diamond-likecarbon films were achieved based on the study of plasma density and OES and characterized byatomic force microscope(AFM),X-ray diffraction instrument(XRD),Raman spectroscope andprofiler.

引用

页码：444 / 447

页数：4

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