A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition

被引：0
|
作者：
赖秀琼 [1 ]
陈俊芳 [1 ]
符斯列 [1 ]
李炜 [1 ]
张茂平 [1 ]
史磊 [1 ]
杨春林 [1 ]
机构：
[1] School of Physics and Telecommunication Engineering,South China Normal University Guangdong 510631,China
来源：
Plasma Science and Technology | 2007年 / 9卷 / 04期
关键词：
plasma density; Langmuir probe; OES; diamond-like carbon thin films;
D O I：
暂无
中图分类号：
O433 [光谱学];
学科分类号：
0703 ; 070302 ;
摘要：
In order to deposit good films,we need to study the uniformity of plasma density andthe plasma density under different gas pressures and powers.The plasma density was diagnosedby a Langmuir probe.The optical emission spectroscopy(OES)of CH4and H2discharge wasobtained with raster spectroscopy,with characteristic peaks of H and CH achieved.Diamond-likecarbon films were achieved based on the study of plasma density and OES and characterized byatomic force microscope(AFM),X-ray diffraction instrument(XRD),Raman spectroscope andprofiler.
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收藏
页码：444 / 447
页数：4
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