Recent Advances in ZnO Films Prepared by Pulsed Laser Deposition

被引：0
|
作者：
HE Jian-ting
机构：
来源：
Semiconductor Photonics and Technology | 2005年 / 04期
关键词：
PLD; ZnO; Substrate temperature; Oxygen pressure;
D O I：
暂无
中图分类号：
TN304.2 [化合物半导体];
学科分类号：
0805 ; 080501 ; 080502 ; 080903 ;
摘要：
Pulsed laser deposition(PLD) is emerging as the most rapid and efficient technique for fabricating the many compound films. ZnO thin films can be prepared under various deposition conditions by PLD. The effects of various substrate temperature, oxygen partial pressure, annealing temperature, substrate, buffer layers thickness and film thickness on micro-structural, optical and electrical properties of ZnO films grown by PLD technology are reviewed. ZnO films with special function can grow under proper conditions by PLD.
引用
收藏
页码：25 / 29+44
页数：6
相关论文
共 50 条
  • [41] SIMS CHARACTERISATION OF ZnO LAYER PREPARED BY PULSED LASER DEPOSITION
    Vincze, Andrej
    Michalka, Miroslav
    Bruncko, Jaroslav
    Uherek, Frantisek
    [J]. ADVANCES IN ELECTRICAL AND ELECTRONIC ENGINEERING, 2005, 4 (02) : 79 - 82
  • [42] Ferromagnetic ZnO nanoparticles prepared by pulsed laser deposition in liquid
    Zhao, Chenlin
    Huang, Yi
    Abiade, Jeremiah T.
    [J]. MATERIALS LETTERS, 2012, 85 : 164 - 167
  • [43] Pulsed laser deposition of ZnO thin films using a femtosecond laser
    Okoshi, M
    Higashikawa, K
    Hanabusa, M
    [J]. APPLIED SURFACE SCIENCE, 2000, 154 : 424 - 427
  • [44] Recent advances in pulsed-laser deposition of complex oxides
    Christen, H. M.
    Eres, G.
    [J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 2008, 20 (26)
  • [45] Low resistivity transparent conducting Al-doped ZnO films prepared by pulsed laser deposition
    Agura, H
    Suzuki, A
    Matsushita, T
    Aoki, T
    Okuda, M
    [J]. THIN SOLID FILMS, 2003, 445 (02) : 263 - 267
  • [46] Structural and magnetic properties in Mn-doped ZnO films prepared by pulsed-laser deposition
    Li, Qiang
    Wang, Yuyin
    Liu, Jiandang
    Kong, Wei
    Ye, Bangjiao
    [J]. APPLIED SURFACE SCIENCE, 2014, 289 : 42 - 46
  • [47] Blue luminescent center and ultraviolet-emission dependence of ZnO films prepared by pulsed laser deposition
    Wei, Xianqi
    Man, Baoyuan
    Xue, Chengshan
    Chen, Chuansong
    Liu, Mei
    [J]. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2006, 45 (11): : 8586 - 8591
  • [48] Highly transparent and conducting fluorine-doped ZnO thin films prepared by pulsed laser deposition
    Cao, Ling
    Zhu, Liping
    Jiang, Jie
    Zhao, Ran
    Ye, Zhizhen
    Zhao, Buihui
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2011, 95 (03) : 894 - 898
  • [49] Effects of substrate temperature on structural and luminescent properties of ZnO thin films prepared by pulsed laser deposition
    Department of Physics, Kunming University of Science and Technology, Kunming 650093, China
    不详
    [J]. Gongneng Cailiao, 2008, 5 (724-726+729):
  • [50] Blue luminescent center and ultraviolet-emission dependence of ZnO films prepared by pulsed laser deposition
    Wei, Xianqi
    Man, Baoyuan
    Xue, Chengshan
    Chen, Chuansong
    Liu, Mei
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (11): : 8586 - 8591
12345