Synthesis and electromagnetic transport of large-area 2D WTe2 thin film

被引：0

作者：

Yumeng Zhang ^{[1
,2
]}

Zhejia Wang ^{[3
,4
]}

Jiaheng Feng ^{[3
,4
]}

Shuaiqiang Ming ^{[1
,3
]}

Furong Qu ^{[1
,2
]}

Yang Xia ^{[1
,2
]}

Meng He ^{[1
]}

Zhimin Hu ^{[1
,2
]}

Jing Wang ^{[5
]}

机构：

[1] Institute of Microelectronics of the Chinese Academy of Sciences

[2] University of Chinese Academy of Sciences

[3] Jiaxing Microelectronics Instrument and Equipment Engineering Center of the Chinese Academy of Sciences

[4] Jiaxing Kemin Electronic Equipment Technology Co., Ltd.

[5] Institute of Physics of the Chinese Academy of Sciences

来源：

Journal of Semiconductors | 2022年 / 43卷 / 10期

关键词：

D O I：

暂无

中图分类号：

TB383.2 []; O441 [电磁学];

学科分类号：

0809 ;

摘要：

Tungsten telluride thin films were successfully prepared on monocrystal sapphire substrates by using atomic layer deposition and chemical vapor deposition technology, and the effects of different tellurization temperatures on the properties of tungsten telluride films were investigated. The growth rate, crystal structure and composition of the film samples were characterized and analyzed by using scanning electron microscope, Raman spectroscopy and X-ray photoelectron spectroscopy. The results showed that tungsten telluride thin films with good crystal orientation in (001) were obtained at telluride temperature of 550 ℃. When the telluride temperature reached 570 ℃, the tungsten telluride began to decompose and unsaturated magnetoresistance was found.

引用

页码：54 / 59

页数：6

共 50 条

[41] Synthesis of large-area high quality 2D BiOI for highly sensitive ultraviolet photodetection
Li, Yixiang
Fu, Zhipeng
Wang, Bicheng
Yao, Yu
Yuan, Jiashuai
Li, Meng
He, Xu
Liu, Wei
JOURNAL OF MATERIALS CHEMISTRY C, 2024, 12 (19) : 6826 - 6830
[42] Sapphire substrates for large-area 2D transition metal dichalcogenides synthesis: A brief review
Krishna, Swathi
Choi, Soo Ho
Kim, Soo Min
Kim, Ki Kang
CURRENT APPLIED PHYSICS, 2024, 59 : 208 - 213
[43] Air-Stable, Large-Area 2D Metals and Semiconductors
Dong, Chengye
Lu, Li-Syuan
Lin, Yu-Chuan
Robinson, Joshua A.
ACS NANOSCIENCE AU, 2024, 4 (02): : 115 - 127
[44] Dry Exfoliation of Large-Area 2D Monolayer and Heterostructure Arrays
Li, Zhiwei
Ren, Liwang
Wang, Shiyu
Huang, Xinxin
Li, Qianyuan
Lu, Zheyi
Ding, Shuimei
Deng, Hanjun
Chen, Pingan
Lin, Jun
Hu, Yuanyuan
Liao, Lei
Liu, Yuan
ACS NANO, 2021, 15 (08) : 13839 - 13846
[45] Spin resonance of 2D electrons in a large-area silicon MOSFET
Shankar, S.
Tyryshkin, A. M.
Avasthi, S.
Lyon, S. A.
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2008, 40 (05): : 1659 - 1661
[46] Few-layer, large-area, 2D covalent organic framework semiconductor thin films
Feldblyum, Jeremy I.
McCreery, Clara H.
Andrews, Sean C.
Kurosawa, Tadanori
Santos, Elton J. G.
Duong, Vincent
Fang, Lei
Ayzner, Alexander L.
Bao, Zhenan
CHEMICAL COMMUNICATIONS, 2015, 51 (73) : 13894 - 13897
[47] Synthesis of WTe2 Nanowires with Increased Electron Scattering
Woods, John M.
Hynek, David
Liu, Pengzi
Li, Min
Cha, Judy J.
ACS NANO, 2019, 13 (06) : 6455 - 6460
[48] First principles phase diagram calculation for the 2D TMD system WS2 - WTe2
Burton, B. P.
Sluiter, M. H. F.
CALPHAD-COMPUTER COUPLING OF PHASE DIAGRAMS AND THERMOCHEMISTRY, 2018, 63 : 142 - 147
[49] Substrate Effects on Growth Dynamics of WTe2 Thin films
Hynek, David J.
Onder, Elifnaz
Hart, James L.
Jin, Gangtae
Wang, Mengjing
Singhania, Raivat M.
Davis, Benjamin
Strandwitz, Nicholas C.
Cha, Judy J.
ADVANCED MATERIALS INTERFACES, 2023, 10 (11)
[50] Magnetic skyrmion manipulation in CrTe2/WTe2 2D van der Waals heterostructure
Fragkos, Sotirios
Pappas, Panagiotis
Symeonidou, Evgenia
Panayiotatos, Yerassimos
Dimoulas, Athanasios
APPLIED PHYSICS LETTERS, 2022, 120 (18)

← 1 2 3 4 5 →