Synthesis and electromagnetic transport of large-area 2D WTe2 thin film

被引：0

作者：

Yumeng Zhang ^{[1
,2
]}

Zhejia Wang ^{[3
,4
]}

Jiaheng Feng ^{[3
,4
]}

Shuaiqiang Ming ^{[1
,3
]}

Furong Qu ^{[1
,2
]}

Yang Xia ^{[1
,2
]}

Meng He ^{[1
]}

Zhimin Hu ^{[1
,2
]}

Jing Wang ^{[5
]}

机构：

[1] Institute of Microelectronics of the Chinese Academy of Sciences

[2] University of Chinese Academy of Sciences

[3] Jiaxing Microelectronics Instrument and Equipment Engineering Center of the Chinese Academy of Sciences

[4] Jiaxing Kemin Electronic Equipment Technology Co., Ltd.

[5] Institute of Physics of the Chinese Academy of Sciences

来源：

Journal of Semiconductors | 2022年 / 43卷 / 10期

关键词：

D O I：

暂无

中图分类号：

TB383.2 []; O441 [电磁学];

学科分类号：

0809 ;

摘要：

Tungsten telluride thin films were successfully prepared on monocrystal sapphire substrates by using atomic layer deposition and chemical vapor deposition technology, and the effects of different tellurization temperatures on the properties of tungsten telluride films were investigated. The growth rate, crystal structure and composition of the film samples were characterized and analyzed by using scanning electron microscope, Raman spectroscopy and X-ray photoelectron spectroscopy. The results showed that tungsten telluride thin films with good crystal orientation in (001) were obtained at telluride temperature of 550 ℃. When the telluride temperature reached 570 ℃, the tungsten telluride began to decompose and unsaturated magnetoresistance was found.

引用

页码：54 / 59

页数：6

共 50 条

[31] Physical Properties of Novel 2D Semimetal WTe2: From Microscopic Study to Devices
Pan, Minghu
Yuan, Hui
LOW-DIMENSIONAL NANOSCALE ELECTRONIC AND PHOTONIC DEVICES 9, 2016, 75 (11): : 3 - 7
[32] Peculiarities of electronic transport in WTe2 single crystal
Marchenkov, V. V.
Perevalova , A. N.
Naumov, S. V.
Podgornykh, S. M.
Marchenkova, E. B.
Chistyakov, V. V.
Huang, J. C. A.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2022, 549
[33] Quantum oscillations of thermopower in WTe2 thin films
Bi, Ran
Feng, Zili
Li, Xinqi
Zhao, Jiaji
Fan, Juewen
Shi, Youguo
Yu, Dapeng
Wu, Xiaosong
PHYSICAL REVIEW B, 2019, 100 (23)
[34] Tunable Photoresponse in 2D WTe2/MoS2 Van der Waals Heterojunctions
Li, Luji
Zhang, Gaojie
Wu, Hao
Yang, Li
Gao, Pengfei
Zhang, Shanfei
Wen, Xiaokun
Zhang, Wenfeng
Chang, Haixin
JOURNAL OF PHYSICAL CHEMISTRY C, 2021, 125 (19): : 10639 - 10645
[35] Temperature-dependent photoconductivity studies of WTe2/MoS2 nanocomposite thin film
Chauhan, Ishant
Kaur, Manjot
Singh, Kulwinder
Kumar, Manjeet
Thakur, Anup
Vij, Ankush
Kumar, Akshay
SURFACES AND INTERFACES, 2022, 29
[36] Synthesis of Semiconducting 2H-Phase WTe2 Nanosheets with Large Positive Magnetoresistance
Li, Shuang
Lei, Feng-cai
Peng, Xu
Wang, Ruo-qi
Xie, Jun-feng
Wu, Ya-pan
Li, Dong-sheng
INORGANIC CHEMISTRY, 2020, 59 (17) : 11935 - 11939
[37] Large, non-saturating magnetoresistance in WTe2
Ali, Mazhar N.
Xiong, Jun
Flynn, Steven
Tao, Jing
Gibson, Quinn D.
Schoop, Leslie M.
Liang, Tian
Haldolaarachchige, Neel
Hirschberger, Max
Ong, N. P.
Cava, R. J.
NATURE, 2014, 514 (7521) : 205 - +
[38] Large, non-saturating magnetoresistance in WTe2
Mazhar N. Ali
Jun Xiong
Steven Flynn
Jing Tao
Quinn D. Gibson
Leslie M. Schoop
Tian Liang
Neel Haldolaarachchige
Max Hirschberger
N. P. Ong
R. J. Cava
Nature, 2014, 514 : 205 - 208
[39] Direct Evidence for Charge Compensation-Induced Large Magnetoresistance in Thin WTe2
Wang, Yaojia
Wang, Lizheng
Liu, Xiaowei
Wu, Heng
Wang, Pengfei
Yan, Dayu
Cheng, Bin
Shi, Youguo
Watanabe, Kenji
Taniguchi, Takashi
Liang, Shi-Jun
Miao, Feng
NANO LETTERS, 2019, 19 (06) : 3969 - 3975
[40] Large-area synthesis of 2D MoO3-x for enhanced optoelectronic applications
Arash, Aram
Ahmed, Taimur
Rajan, Ananth Govind
Walia, Sumeet
Rahman, Fahmid A.
Mazumder, Aishani
Ramanathan, Rajesh
Sriram, Sharath
Bhaskaran, Madhu
Mayes, Edwin
Strano, Michael S.
Balendhran, Sivacarendran
2D MATERIALS, 2019, 6 (03)

← 1 2 3 4 5 →