INFLUENCE OF NITROGEN ON THERMAL WARPAGE IN CZOCHRALSKI SILICON WAFERS

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作者：
Lu Huanming State Key Laboratory of Silicon Material Science
机构：
来源：
Transactions of Nonferrous Metals Society of China | 1999年 / 02期
关键词：
nitrogenthermal warpagemechanical strengthsilicon wafers;
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中图分类号：
TN304.055 [];
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摘要：
１ＩＮＴＲＯＤＵＣＴＩＯＮＦｏｒｍａｎｙｙｅａｒｓ，ｗａｒｐａｇｅｏｆｓｉｌｉｃｏｎｗａｆｅｒｓｈａｓｂｅｅｎｃｏｎｃｅｒｎｅｄｉｎｖｅｒｙｌａｒｇｅｓｃａｌｅｉｎｔｅｇｒａｔｅｄｃｉｒｃｕｉｔ（ＶＬＳＩ）ｍａｎｕｆａｃｔｕｒｉｎｇ［１－４］．Ｕｓ...
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页码：148 / 150
页数：3
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