Analytical model including the fringing-induced barrier lowering effect for a dual-material surrounding-gate MOSFET with a high-κ gate dielectric

被引:0
|
作者
李聪 [1 ]
庄奕琪 [1 ]
张丽 [1 ]
包军林 [1 ]
机构
[1] School of Microelectronics, Xidian University, Xi’an 710071, China
基金
中央高校基本科研业务费专项资金资助; 中国国家自然科学基金;
关键词
high-k gate dielectric; fringing-induced barrier lowering; analytical model;
D O I
暂无
中图分类号
TN386.1 [金属-氧化物-半导体(MOS)器件];
学科分类号
0805 ; 080501 ; 080502 ; 080903 ;
摘要
By solving Poisson’s equation in both semiconductor and gate insulator regions in the cylindrical coordinates, an analytical model for a dual-material surrounding-gate (DMSG) metal–oxide semiconductor field-effect transistor (MOSFET) with a high-κ gate dielectric has been developed. Using the derived model, the influences of fringing-induced barrier lowering (FIBL) on surface potential, subthreshold current, DIBL, and subthreshold swing are investigated. It is found that for the same equivalent oxide thickness, the gate insulator with high-κ dielectric degrades the short-channel performance of the DMSG MOSFET. The accuracy of the analytical model is verified by the good agreement of its results with that obtained from the ISE three-dimensional numerical device simulator.
引用
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页码:609 / 615
页数:7
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