Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

被引：0
|
作者：
Ji-jun XIONG [1 ,2 ]
Shi-jun ZHENG [1 ,2 ]
Ying-ping HONG [1 ,2 ]
Jun LI [3 ]
Ying-lin WANG [3 ]
Wei WANG [1 ,2 ]
Qiu-lin TAN [1 ,2 ]
机构：
[1] Key Laboratory of Instrumentation Science & Dynamic Measurement,North University of China
[2] The Second Research Institute of China Electronics Technology Group Corporation
[3] MOE Science and Technology on Electronic Test & Measurement Laboratory,North University of China
来源：
Frontiers of Information Technology & Electronic Engineering | 2013年 / 04期
基金：
中国国家自然科学基金;
关键词：
High temperature co-fired ceramic(HTCC); Wireless; Micro-electro-mechanical systems(MEMS);
D O I：
暂无
中图分类号：
TP211.4 []; TP212 [发送器（变换器）、传感器];
学科分类号：
080202 ; 0804 ; 080401 ; 080402 ;
摘要：
High temperature co-fired ceramics(HTCCs) have wide applications with stable mechanical properties,but they have not yet been used to fabricate sensors.By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity,the designed sensors made from HTCC materials(zirconia and 96% alumina) are fabricated,and their capacities for the pressure measurement are tested using a wireless interrogation method.Using the fabricated sensor,a study is conducted to measure the atmospheric pressure in a sealed vessel.The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm.The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.
引用
收藏
页码：258 / 263
页数：6
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