Overview on low temperature co-fired ceramic sensors

被引：68

作者：

Jurkow, Dominik ^{[1
]}

Maeder, Thomas ^{[2
]}

Dabrowski, Arkadiusz ^{[1
]}

Zarnik, Marina Santo ^{[3
]}

Belavic, Darko ^{[3
]}

Bartsch, Heike ^{[4
]}

Mueller, Jens ^{[4
]}

机构：

[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, Wybrzeze Wyspianskiego 27, PL-50370 Wroclaw, Poland

[2] Ecole Polytech Fed Lausanne, LPM, CH-1015 Lausanne, Switzerland

[3] Jozef Stefan Inst, Ljubljana 1000, Slovenia

[4] Tech Univ Ilmenau, IMN MacroNano, D-98693 Ilmenau, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2015年 / 233卷

关键词：

LTCC; Sensor; Ceramics; CAPACITIVE PRESSURE SENSOR; LASER-ABLATION; PRESSURE/FLOW/TEMPERATURE MULTISENSOR; PROXIMITY SENSOR; COMPRESSED-AIR; GREEN TAPES; LTCC TAPE; TECHNOLOGY; FABRICATION; DESIGN;

D O I：

10.1016/j.sna.2015.05.023

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Low temperature co-fired ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to printed circuit boards (PCB) and classical thick-film technology, and it has found the application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：125 / 146

页数：22

共 50 条

[1] A Low Temperature Co-Fired Ceramic Mesofluidic Separator
Zhu, Jijun
Cheng, Jia
Ang, Simon S.
[J]. INTERNATIONAL MEMS CONFERENCE 2006, 2006, 34 : 734 - 739
[2] Structuration and fabrication of sensors based on LTCC (Low temperature co-fired ceramic) technology
Birol, Hansu
Maeder, Thomas
Jacq, Caroline
Corradini, Giancarlo
Boers, Marc
Straessler, Sigfrid
Ryser, Peter
[J]. HIGH-PERFORMANCE CERAMICS IV, PTS 1-3, 2007, 336-338 : 1849 - +
[3] DESIGN AND APPLICATION OF LOW TEMPERATURE CO-FIRED CERAMIC SUBSTRATES FOR SENSORS IN ROAD VEHICLES
Horvath, Eszter
Torok, Adam
Harsanyi, Gabor
[J]. TRANSPORT, 2013, 28 (01) : 81 - 88
[4] Sintering and thermomechanical behavior of a Low Temperature Co-fired Ceramic
Heux, A.
Antou, G.
Pradeilles, N.
Delhote, N.
Karnfelt, C.
Gallee, F.
Maitre, A.
[J]. CERAMICS INTERNATIONAL, 2018, 44 (18) : 22609 - 22615
[5] A Biocompatible Low Temperature Co-fired Ceramic Substrate for Biosensors
Luo, Jin
Eitel, Richard E.
[J]. INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2014, 11 (03) : 436 - 442
[6] A Low Temperature Co-fired Ceramic Microfluidic Cell Counter
Priya, Rathi A.
Vimala, Juliet A.
[J]. DYNAMICS OF MACHINES AND MECHANISMS, INDUSTRIAL RESEARCH, 2014, 592-594 : 2261 - 2266
[7] Capacitive Low Temperature Co-Fired Ceramic Fluidic Sensor
Radosavljevic, Goran
Pochia, Mariana Madalina
Rosca, Daniela
Blaz, Nelu
Maric, Andrea
[J]. SENSOR LETTERS, 2013, 11 (04) : 646 - 649
[8] A review on wireless sensors fabricated using the low temperature co-fired ceramic (LTCC) technology
Li, Yongxiang
Guo, Xiangyang
[J]. AUSTRALIAN JOURNAL OF MECHANICAL ENGINEERING, 2021, 19 (05) : 699 - 711
[9] Low temperature co-fired ceramics on optoelectronic sensors integration
Moilanen, Ville
Kautio, Kari
Karioja, Pentti
Rikola, Rairno
Lehtomaa, Jarmo
Malinen, Jouko
[J]. OPTICAL SENSING TECHNOLOGY AND APPLICATIONS, 2007, 6585
[10] Monolithic Microwave-Microfluidic Sensors Made with Low Temperature Co-Fired Ceramic (LTCC) Technology
Malecha, Karol
Jasinska, Laura
Grytsko, Anna
Drzozga, Kamila
Slobodzian, Piotr
Cabaj, Joanna
[J]. SENSORS, 2019, 19 (03):

← 1 2 3 4 5 →