Bulk GaN-based SAW resonators with high quality factors for wireless temperature sensor

被引：0
|
作者：
Hongrui Lv [1 ,2 ]
Xianglong Shi [3 ]
Yujie Ai [1 ,2 ]
Zhe Liu [1 ]
Defeng Lin [1 ,4 ]
Lifang Jia [1 ]
Zhe Cheng [1 ]
Jie Yang [1 ]
Yun Zhang [1 ,2 ]
机构：
[1] Institute of Semiconductors, Chinese Academy of Sciences
[2] Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences
[3] Beijing Aerospace Micro-electronics Technology Co.
[4] Lishui Zhongke Semiconductor Material Co., Ltd.
来源：
Journal of Semiconductors | 2022年 / 43卷 / 11期
关键词：
D O I：
暂无
中图分类号：
TP212 [发送器（变换器）、传感器]; TN751.2 [谐振];
学科分类号：
080202 ;
摘要：
Surface acoustic wave(SAW) resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN. The impact of device parameters including aspect ratio of length to width of resonators, number of interdigital transducers, and acoustic propagation direction on resonator performance have been studied. For the first time, we demonstrate wireless temperature sensing from 21.6 to 120 °C with a stable temperature coefficient of frequency of –24.3 ppm/°C on bulk GaN-based SAW resonators.
引用
收藏
页码：81 / 86
页数：6
相关论文
共 50 条
  • [41] Transverse Spurious Mode Free SAW Resonators and Delay Line on GaN/Si with High Quality Factor
    Yu, Guofang
    Liang, Renrong
    Zhao, Haiming
    Fu, Jun
    Ren, Tian-Ling
    2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM, 2023,
  • [42] Bulk GaN-based Schottky rectifier and UV photodetector
    Park, M.
    Zhou, Y.
    Ahyi, C.
    Wang, D.
    Tin, C. C.
    Williams, J.
    Williams, N. M.
    Hanser, A. D.
    Preble, E. A.
    Evans, K.
    2007 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, VOLS 1 AND 2, 2007, : 405 - +
  • [43] A High-Efficiency GaN-based Transmitter for Wireless Power Transfer System
    Zhou, Zhe
    Li, Weiguo
    Wang, Chao
    Huang, Kai
    Wang, Kui
    Li, Yongdong
    PROCEEDINGS OF THE 2019 14TH IEEE CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS (ICIEA 2019), 2019, : 1699 - 1702
  • [44] Strain Measurements With Langasite SAW Resonators at High Temperature
    Li, Ling
    Peng, Bin
    Zhu, Jialiang
    He, Zhengxi
    Yang, Yuntao
    Zhang, Wanli
    IEEE SENSORS JOURNAL, 2021, 21 (04) : 4688 - 4695
  • [45] Development of chipless and wireless underground temperature sensor system based on magnetic antennas and SAW sensor
    Kim, Sihyeok
    Adib, Md Ridwan
    Lee, Keekeun
    SENSORS AND ACTUATORS A-PHYSICAL, 2019, 297
  • [46] AlN/Si based SAW resonators for very high sensitivity temperature sensors
    Nicoloiu, Alexandra
    Mueller, Alexandra
    Zdru, Ioana
    Vasilache, Dan
    Stan, George E.
    Nastase, Claudia
    Dumitru, Viorel
    Dinescu, Adrian
    2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2018,
  • [47] High Quality Factor Hybrid SAW/BAW Resonators
    Barsoum, S.
    Hellion, C.
    Vermande, E.
    Quemper, J. M.
    Bousquet, M.
    Reinhardt, A.
    Laroche, T.
    Ballandras, S.
    Dubus, B.
    2022 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFCS), 2022,
  • [48] High temperature interrogation unit for wireless SAW-based temperature sensors
    Francois, B.
    Droit, C.
    Martin, G.
    Friedt, J-M.
    Ballandras, S.
    EUROSENSORS XXV, 2011, 25
  • [49] Universal pressure and temperature SAW sensor for wireless applications
    Buff, W
    Rusko, M
    Goroll, M
    Ehrenpfordt, J
    Vandahl, T
    1997 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 & 2, 1997, : 359 - 362
  • [50] Modeling of a Wireless SAW Temperature Sensor and Associated Antenna
    Laurent ALLIES
    Eloi BLAMPAIN
    Hamid M’JAHED
    Gérard PRIEUR
    Omar ELMAZRIA
    Instrumentation, 2014, 01 (01) : 8 - 14
12345