OBSERVATION ON SPUTTERING SURFACE OF ALLOYS IN GLOW DISCHARGE

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作者：
REN Jianshi ZHAO Huilin ZHANG Gongshu Institute of Metal Research
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来源：
Acta Metallurgica Sinica(English Letters) | 1990年 / 07期
关键词：
glow discharge; cathodic sputtering; nickel base alloy;
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摘要：
Glow discharge cathodic sputtering of alloys containing second phase precipitates or injectedoxide particles has been observed with energy dispersive X-ray spectrometer and scanningelectron microprobe.It was shown that the formation of cones during the sputtering in thesealloys is due to masking of the matrix by glow sputtering second phase precipitates or oxideparticles.At steady state,the density of cottes were found to be a function of the densities pre-cipitates or oxide particles in bulk alloy.In addition to the changes of local sputtering rate,theelectrostatic effect may play a role on the formation fo cones.
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页码：65 / 69
页数：5
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