LANGMUIR PROBE MEASUREMENTS IN NEGATIVE GLOW OF A SPUTTERING DC DISCHARGE

被引：13
|
作者：
LEMPERIERE, G
POITEVIN, JM
FOURRIER, C
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1978年 / 11卷 / 03期
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D O I：
10.1088/0022-3727/11/3/016
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：293 / 300
页数：8
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