Novel photoresist stripping technology using steam-water mixture

被引：0
|
作者：
王磊 [1 ]
惠瑜 [1 ]
高超群 [1 ]
景玉鹏 [1 ]
机构：
[1] Microelectronic Equipment Technology DepartmentInstitute of Microelectronics,Chinese Academy of Sciences
来源：
Journal of Semiconductors | 2011年 / 32卷 / 02期
基金：
中国国家自然科学基金;
关键词：
photoresist stripping; plasma ash; wet stripping; steam-water mixture; jet spray;
D O I：
暂无
中图分类号：
TN305.7 [光刻、掩膜];
学科分类号：
1401 ;
摘要：
A novel wet vapor photoresist stripping technology is developed as an alternative to dry plasma ashing and wet stripping.Experiments using this technology to strip hard baked SU-8 photoresist,aurum and chromium film are carried out.Then the images of stripping results are shown and the mechanism is analyzed and discussed. The most striking result of this experiment is that the spraying mixture of steam and water droplets can strip photoresist and even metal film with ease.
引用
收藏
页码：142 / 148
页数：7
相关论文
共 50 条
  • [21] HYDRAULIC RESISTANCE WITH A STEAM-WATER MIXTURE FLOWING IN A VERTICAL HEATED TUBE
    TARASOVA, NV
    LEONTEV, AI
    HIGH TEMPERATURE, 1965, 3 (01) : 102 - &
  • [22] Photoresist stripping using ozone/deionized water chemistry
    Kashkoush, I
    Matthews, R
    Novak, R
    Brause, E
    Carrillo, F
    Rajaram, B
    SCIENCE AND TECHNOLOGY OF SEMICONDUCTOR SURFACE PREPARATION, 1997, 477 : 173 - 178
  • [23] Efficiency of partial water removal during transmission of steam-water mixture on geothermal fields
    A. N. Shulyupin
    Journal of Volcanology and Seismology, 2007, 1 : 328 - 332
  • [24] The impact of the steam-water mixture heterogeneity on the results of boiling water reactor cell calculations
    Goltsev, AO
    Martynov, DN
    Marin, SV
    Lekomtsev, AA
    NUCLEAR TECHNOLOGY, 2000, 131 (02) : 153 - 158
  • [25] A novel method for photoresist stripping using ozone de-ionized water chemistry
    Kashkoush, I
    Novak, R
    Matthews, R
    1997 IEEE INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING CONFERENCE PROCEEDINGS, 1997, : P81 - P85
  • [26] Photoresist stripping using ozone/deionized water chemistry
    Kashkoush, II
    Matthews, R
    Novak, RE
    CLEANING TECHNOLOGY IN SEMICONDUCTOR DEVICE MANUFACTURING V, 1998, 35 : 471 - 479
  • [27] Efficiency of Partial Water Removal during Transmission of Steam-Water Mixture on Geothermal Fields
    Shulyupin, A. N.
    JOURNAL OF VOLCANOLOGY AND SEISMOLOGY, 2007, 1 (05) : 328 - 332
  • [28] Steam entrainment and heat transfer characteristic of steam submerged jet condensation within steam-water mixture layer
    Zhao, Quanbin
    Fu, Pengfei
    Chong, Daotong
    Chen, Weixiong
    Liu, Jiping
    Yan, Junjie
    INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 2023, 201
  • [29] EXPERIMENTAL INVESTIGATION OF HYDRAULIC RESISTANCE OF PERFORATED PLATES IN STEAM-WATER MIXTURE.
    Ryabov, G.A.
    Karasev, V.B.
    Kozlov, Yu.V.
    1600, (31):
  • [30] SOME FEATURES OF BURNOUT WITH ANNULAR-FLOW OF STEAM-WATER MIXTURE IN A TUBE
    DOROSHCHUK, VE
    THERMAL ENGINEERING, 1981, 28 (04) : 195 - 196
12345