Effect of Single-Wall Carbon Nanotube Doping on Solution-Processed Indium Oxide Thin-Film Transistors

被引:0
|
作者
Zhao, Han-Lin [1 ]
Kim, Sung-Jin [1 ,2 ]
机构
[1] Chungbuk Natl Univ, Coll Elect & Comp Engn, Cheongju 28644, South Korea
[2] Chungbuk Natl Univ Hosp, Biomed Res Inst, Cheongju 28644, South Korea
基金
新加坡国家研究基金会;
关键词
Thin film transistors; Doping; Performance evaluation; Logic gates; Thermal stability; Substrates; Indium; Circuit stability; Carbon nanotubes; Annealing; indium oxide (In2O3); inverter; single-wall carbon nanotubes (SW-CNTs); thin-film transistors (TFTs); HIGH-PERFORMANCE; LOW-TEMPERATURE; FABRICATION; DEVICES; LIGHT;
D O I
10.1109/TED.2024.3499941
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
p-type conductivity often observed in single-wall carbon nanotube (SW-CNT) thin-film transistors (TFTs) is usually attributed to the doping effect of oxygen adsorption when SW-CNT are exposed to air caused by differences in the figure of merit, which results in asymmetric electron and hole injection. We performed comparative tests by doping SW-CNTs into the Indium oxide (In2O3/SW- CNT) channel layer, fabricated semiconductor devices, and investigated the device performance and film properties. It was determined that both In2O3 and In2O3/SW-CNT devices exhibit n-type behavior with significant saturation behavior and gate control under positive bias. The In2O3/SW-CNT TFTs have higher saturation mobility (mu (sat)) and on/off current ratio (I-ON/I-OFF). In particular, the mu ( sat) is increased by similar to 3 times, and the I- ON /I- OFF is increased to similar to 10 (6) . Also, under negative bias stress (NBS), it exhibits better stability and signal inversion capability by resistive loading of the inverter. These results indicate that solution- prepared In2O3/SW-CNT TFTs can be used in low-cost, low-temperature, high-performance electronic devices.
引用
收藏
页码:271 / 276
页数:6
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