Modeling of dynamic hysteresis nonlinearity for piezo-positioning actuators

被引：0

作者：

Liu, Haotian ^{[1
]}

Han, Xue ^{[1
]}

Shang, Fengying ^{[1
]}

Zhang, Guilin ^{[1
]}

机构：

[1] Shandong Univ Sci & Technol, Qingdao 266590, Peoples R China

来源：

2022 34TH CHINESE CONTROL AND DECISION CONFERENCE, CCDC | 2022年

关键词：

Piezo-positioning actuators; Dynamic hysteresis nonlinearity; Hammerstein model; Hanekel matrix; PIEZOELECTRIC ACTUATORS; HAMMERSTEIN SYSTEMS; IDENTIFICATION; COMPENSATION;

D O I：

10.1109/CCDC55256.2022.10033595

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The dynamic hysteresis nonlinearity of the piezo-positioning actuators seriously affects the positioning accuracy. In order to accurately describe this dynamic hysteresis nonlinearity, a new modeling method is proposed by using the structure of Hammerstein model, where the static hysteresis nonlinear part is described by the Prandtl-Ishlinskii model, and the linear dynamic part is described by the system transfer function identified by the Hankel matrix. The experimental results show that when the input frequency is 1Hz to 100Hz, the root means square error of the proposed model is less than 0.3589 mu m and the relative error is less than 0.0200.

引用

页码：5958 / 5963

页数：6

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