Design of Two-degree-of-freedom H∞ Controller for Three-dimensional Piezo-positioning System

被引：0
|
作者：
Lan, Xuying [1 ,2 ,3 ]
Liang, Dongxu [1 ,3 ]
Mao, Chengwen [1 ,3 ]
Li, Aiguo [1 ,3 ]
Wang, Jie [1 ,3 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai, Peoples R China
[2] Univ Chinese Acad Sci, Beijing, Peoples R China
[3] Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai, Peoples R China
来源：
PROCEEDINGS OF 2019 IEEE 3RD INFORMATION TECHNOLOGY, NETWORKING, ELECTRONIC AND AUTOMATION CONTROL CONFERENCE (ITNEC 2019) | 2019年
关键词：
piezo-positioning stage; two-degrees-of-freedom H-infinity control; decoupling;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The piezo-positioning stage driven by piezoelectric (PZT) actuators has been widely used in the precision engineering field. In order to control three-dimensional piezo-positioning system with good robustness, high bandwidth and high resolution, a two-degree-of-freedom (2-DOF) H-infinity control system is given. In this control system, a pre-and post-compensator was designed to shape desired singular values of positioning system. Based on this shaped plant, 2-DOF controller was constructed with a prefilter and a feedback controller, it can obtain desired dynamic performance and robustness. According to simulation results, by comparing with PID controller, the proposed controller obviously reduces the coupling effect, gives an improvement of bandwidth and resolution, and has better robustness. These indicate that the designed controller is effective and feasible.
引用
收藏
页码：1078 / 1082
页数：5
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