Silica Waveguide Thermo-Optic Mode Switch with Bimodal S-Bend

A silica waveguide thermo-optic mode switch with small radius bimodal S-bends is demonstrated in this study. The cascaded multimode interference coupler is adopted to implement the E11 and E21 mode selective output. The beam propagation method is used in design optimization. Standard CMOS processing of ultraviolet photolithography, chemical vapor deposition, and plasma etching are adopted in fabrication. Detailed characterizations on the prepared switch are performed to confirm the precise fabrication. The measurement results show that within the wavelength range from 1530 to 1575 nm, for the E11 mode input, the switch exhibits an extinction ratio of >= 13.1 dB and a crosstalk <=-22.8 dB at an electrical driving power of 284.8 mW, while for the E21 mode input, the extinction ratio is >= 15.5 dB and the crosstalk is <=-18.1 dB at an electrical driving power of 282.4 mW. These results prove the feasibility of multimode S-bends in mode switching. The favorable performance of the demonstrated switch promises good potential for on-chip mode routing.