[1] Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China
[2] Harbin Inst Technol, Sch Phys, Harbin 150001, Peoples R China
[3] Harbin Inst Technol, Sch Instrumentat Sci & Engn, Harbin 150001, Peoples R China
[4] Chinese Acad Sci, Suzhou Inst Nanotech & Nanob, Nanofabricat Facil, Suzhou 215123, Peoples R China