MEMS gyroscopes in different operation modes: A review

被引：0
|
作者：
Chen, Zhennan [1 ,2 ]
Yan, Kaichen [2 ]
Wang, Xiaoxu [2 ]
Li, Rui [2 ]
Zhang, Ao [2 ]
Wang, Xiquan [2 ]
Wang, Yupeng [2 ]
Gao, Pu [2 ]
Li, Hua [2 ]
Wang, Chao [2 ]
Zhang, Junling [2 ]
Liu, Mingyong [3 ]
Lu, Qianbo [1 ,4 ]
机构：
[1] Northwestern Polytech Univ, Inst Flexible Elect, 127 West Youyi Rd, Xian 710072, Peoples R China
[2] Northwestern Polytech Univ, Sch Automat, 127 West Youyi Rd, Xian 710072, Peoples R China
[3] Northwestern Polytech Univ, Coll Marine, 127 West Youyi Rd, Xian 710072, Peoples R China
[4] Northwestern Polytech Univ, Key Lab Flexible Elect Zhejiang Prov, Ningbo Inst, Ningbo 315103, Peoples R China
来源：
MEASUREMENT | 2025年 / 249卷
基金：
中国国家自然科学基金;
关键词：
MEMS gyroscope; AM mode; FM mode; RATE INTEGRATING GYROSCOPE; DISK RESONATOR GYROSCOPE; MICRO-SHELL RESONATOR; WHOLE-ANGLE; VIBRATORY GYROSCOPE; BIAS INSTABILITY; MASS GYROSCOPE; RING GYROSCOPE; ADAPTIVE MODE; FM GYROSCOPE;
D O I：
10.1016/j.measurement.2025.116996
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The MEMS Coriolis Vibratory Gyroscope (CVG), a type of micro-inertial sensor, has been extensively utilized across various domains such as camera stabilization, virtual reality, inertial mouse, aerospace, autopilot, and wearable devices due to its merits of high precision, compactness, and robust immunity. In recent years, MEMS gyroscopes with new operation modes have continued to appear, whereas their performances vary greatly with respect to the different measurement principles. This paper aims to provide an overview of various types of operation modes and describe the essential features of the gyroscopes underlying the operation modes. According to the readout technology, the operation modes of MEMS gyroscopes are classified into amplitude-modulated (AM), whole angle (WA), and frequency-modulated (FM) gyroscopes. Following a brief introduction to their working principles, this paper highlights some recent representative works and outlines the advantages and disadvantages of all kinds of MEMS gyroscopes, along with their potential applications and development trends. The detailed comparison and content sketch a path for the operation modes of MEMS gyroscopes and may help build a holistic understanding of trade-offs and further work in this area.
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收藏
页数：25
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