MEMS gyroscopes in different operation modes: A review

被引：0
|
作者：
Chen, Zhennan [1 ,2 ]
Yan, Kaichen [2 ]
Wang, Xiaoxu [2 ]
Li, Rui [2 ]
Zhang, Ao [2 ]
Wang, Xiquan [2 ]
Wang, Yupeng [2 ]
Gao, Pu [2 ]
Li, Hua [2 ]
Wang, Chao [2 ]
Zhang, Junling [2 ]
Liu, Mingyong [3 ]
Lu, Qianbo [1 ,4 ]
机构：
[1] Northwestern Polytech Univ, Inst Flexible Elect, 127 West Youyi Rd, Xian 710072, Peoples R China
[2] Northwestern Polytech Univ, Sch Automat, 127 West Youyi Rd, Xian 710072, Peoples R China
[3] Northwestern Polytech Univ, Coll Marine, 127 West Youyi Rd, Xian 710072, Peoples R China
[4] Northwestern Polytech Univ, Key Lab Flexible Elect Zhejiang Prov, Ningbo Inst, Ningbo 315103, Peoples R China
来源：
MEASUREMENT | 2025年 / 249卷
基金：
中国国家自然科学基金;
关键词：
MEMS gyroscope; AM mode; FM mode; RATE INTEGRATING GYROSCOPE; DISK RESONATOR GYROSCOPE; MICRO-SHELL RESONATOR; WHOLE-ANGLE; VIBRATORY GYROSCOPE; BIAS INSTABILITY; MASS GYROSCOPE; RING GYROSCOPE; ADAPTIVE MODE; FM GYROSCOPE;
D O I：
10.1016/j.measurement.2025.116996
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The MEMS Coriolis Vibratory Gyroscope (CVG), a type of micro-inertial sensor, has been extensively utilized across various domains such as camera stabilization, virtual reality, inertial mouse, aerospace, autopilot, and wearable devices due to its merits of high precision, compactness, and robust immunity. In recent years, MEMS gyroscopes with new operation modes have continued to appear, whereas their performances vary greatly with respect to the different measurement principles. This paper aims to provide an overview of various types of operation modes and describe the essential features of the gyroscopes underlying the operation modes. According to the readout technology, the operation modes of MEMS gyroscopes are classified into amplitude-modulated (AM), whole angle (WA), and frequency-modulated (FM) gyroscopes. Following a brief introduction to their working principles, this paper highlights some recent representative works and outlines the advantages and disadvantages of all kinds of MEMS gyroscopes, along with their potential applications and development trends. The detailed comparison and content sketch a path for the operation modes of MEMS gyroscopes and may help build a holistic understanding of trade-offs and further work in this area.
引用
收藏
页数：25
相关论文
共 50 条
  • [21] ACOUSTICALLY ISOLATED MEMS BAW GYROSCOPES
    Serrano, Diego Emilio
    Rahafrooz, Amir
    Younkin, Duane
    Nunan, Kieran
    Dalal, Mitul
    Pal, Sagnik
    Jafri, Ijaz
    2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 853 - 856
  • [22] Adaptive controller design of MEMS gyroscopes
    Park, S
    Horowitz, R
    Tan, CW
    2001 IEEE INTELLIGENT TRANSPORTATION SYSTEMS - PROCEEDINGS, 2001, : 496 - 501
  • [23] PARAMETRIC AMPLIFICATION/DAMPING IN MEMS GYROSCOPES
    Sharma, Mrigank
    Sarraf, Elie. H.
    Cretu, Edmond
    2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 617 - 620
  • [24] Reliability of vacuum packaged MEMS gyroscopes
    Choa, SH
    MICROELECTRONICS RELIABILITY, 2005, 45 (02) : 361 - 369
  • [25] THE APPLICATION OF PARAMETRIC EXCITATION IN MEMS GYROSCOPES
    Gallacher, Barry J.
    Hu, Zhongxu
    Harish, Kiran Mysore
    Bowles, Stephen
    Grigg, Harry
    PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2013, VOL 7B, 2014,
  • [26] MEMS Gyroscopes as Physical Unclonable Functions
    Willers, Oliver
    Huth, Christopher
    Guajardo, Jorge
    Seidel, Helmut
    CCS'16: PROCEEDINGS OF THE 2016 ACM SIGSAC CONFERENCE ON COMPUTER AND COMMUNICATIONS SECURITY, 2016, : 591 - 602
  • [27] Investigation of Air Damping in Different Vibrational Modes of Lateral-axis gyroscopes
    Fan, Bo
    Chen, Aoyun
    Hu, Wenyan
    Zheng, Fen
    Xu, Dacheng
    Guo, Shuwen
    2017 IEEE SENSORS, 2017, : 795 - 797
  • [28] AGC-LESS OPERATION OF HIGH-STABILITY LISSAJOUS FREQUENCY-MODULATED MEMS GYROSCOPES
    Bordiga, Elia
    Bestetti, Marco
    Langfelder, Giacomo
    2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 594 - 597
  • [29] Low-Motion Amplitude Operation of Lissajous Frequency Modulated MEMS Gyroscopes for Spurious Harmonics Reduction
    Nastri, Riccardo
    Padovani, Christian
    Bestetti, Marco
    Zega, Valentina
    Falorni, Luca
    Langfelder, Giacomo
    IEEE SENSORS LETTERS, 2023, 7 (11)
  • [30] Ultra-High Q Silicon Gyroscopes with Interchangeable Rate and Whole Angle Modes of Operation
    Trusov, Alexander A.
    Prikhodko, Igor P.
    Zotov, Sergei A.
    Schofield, Adam R.
    Shkel, Andrei M.
    2010 IEEE SENSORS, 2010, : 864 - 867
12345